10/27/2011	8:19:32 AM	Main Vac valve closed
10/27/2011	8:19:54 AM	Main Vac valve opened
10/27/2011	8:20:07 AM	Tube furnace set to 150
10/27/2011	8:30:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/27/2011	8:30:17 AM	Recipe started at 8:30 AM
10/27/2011	8:30:17 AM	Helium valve closed
10/27/2011	8:30:17 AM	H2 valve closed
10/27/2011	8:30:17 AM	BCl3 valve closed
10/27/2011	8:30:17 AM	PH3 valve closed
10/27/2011	8:30:17 AM	SiCl4 pre valve closed
10/27/2011	8:30:17 AM	SiCl4 post valve closed
10/27/2011	8:30:17 AM	Main Vac valve closed
10/27/2011	8:30:17 AM	Bypass valve closed
10/27/2011	8:30:17 AM	Bubbler valve closed
10/27/2011	8:30:17 AM	Helium MFC set to  0.000000
10/27/2011	8:30:17 AM	H2 MFC set to  0.000000
10/27/2011	8:30:17 AM	BCl3 MFC set to  0.000000
10/27/2011	8:30:17 AM	PHl3 MFC set to  0.000000
10/27/2011	8:30:17 AM	SiCl4 MFC set to  0.000000
10/27/2011	8:30:17 AM	Bypass solenoid MFC set to  0.000000
10/27/2011	8:30:17 AM	Tube furnace set to 0
10/27/2011	8:30:20 AM	H2 valve closed
10/27/2011	8:30:20 AM	BCl3 valve closed
10/27/2011	8:30:20 AM	PH3 valve closed
10/27/2011	8:30:20 AM	SiCl4 pre valve closed
10/27/2011	8:30:21 AM	SiCl4 post valve closed
10/27/2011	8:30:21 AM	Main Vac valve closed
10/27/2011	8:30:21 AM	Bypass valve closed
10/27/2011	8:30:21 AM	Bubbler valve closed
10/27/2011	8:30:21 AM	Helium valve opened
10/27/2011	8:30:21 AM	Helium MFC set to  500.000000
10/27/2011	8:30:21 AM	H2 MFC set to  0.000000
10/27/2011	8:30:21 AM	BCl3 MFC set to  0.000000
10/27/2011	8:30:21 AM	PHl3 MFC set to  0.000000
10/27/2011	8:30:21 AM	SiCl4 MFC set to  0.000000
10/27/2011	8:30:21 AM	Bypass solenoid MFC set to  0.000000
10/27/2011	8:30:21 AM	Tube furnace set to 0
10/27/2011	8:31:23 AM	Helium valve closed
10/27/2011	8:31:23 AM	H2 valve closed
10/27/2011	8:31:23 AM	BCl3 valve closed
10/27/2011	8:31:23 AM	PH3 valve closed
10/27/2011	8:31:23 AM	SiCl4 pre valve closed
10/27/2011	8:31:23 AM	SiCl4 post valve closed
10/27/2011	8:31:23 AM	Main Vac valve closed
10/27/2011	8:31:23 AM	Bypass valve closed
10/27/2011	8:31:23 AM	Bubbler valve closed
10/27/2011	8:31:23 AM	Helium MFC set to  0.000000
10/27/2011	8:31:23 AM	H2 MFC set to  0.000000
10/27/2011	8:31:23 AM	BCl3 MFC set to  0.000000
10/27/2011	8:31:23 AM	PHl3 MFC set to  0.000000
10/27/2011	8:31:23 AM	SiCl4 MFC set to  0.000000
10/27/2011	8:31:23 AM	Bypass solenoid MFC set to  0.000000
10/27/2011	8:31:23 AM	Tube furnace set to 0
10/27/2011	8:31:24 AM	Run finished at 8:31 AM
10/27/2011	8:31:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/27/2011	8:35:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/27/2011	8:35:17 AM	Recipe started at 8:35 AM
10/27/2011	8:35:17 AM	Helium valve closed
10/27/2011	8:35:17 AM	H2 valve closed
10/27/2011	8:35:17 AM	BCl3 valve closed
10/27/2011	8:35:17 AM	PH3 valve closed
10/27/2011	8:35:17 AM	SiCl4 pre valve closed
10/27/2011	8:35:17 AM	SiCl4 post valve closed
10/27/2011	8:35:17 AM	Main Vac valve closed
10/27/2011	8:35:17 AM	Bubbler valve closed
10/27/2011	8:35:17 AM	Bypass valve opened
10/27/2011	8:35:17 AM	Helium MFC set to  0.000000
10/27/2011	8:35:17 AM	H2 MFC set to  0.000000
10/27/2011	8:35:17 AM	BCl3 MFC set to  0.000000
10/27/2011	8:35:17 AM	PHl3 MFC set to  0.000000
10/27/2011	8:35:17 AM	SiCl4 MFC set to  0.000000
10/27/2011	8:35:17 AM	Bypass solenoid MFC set to  0.000000
10/27/2011	8:35:17 AM	Tube furnace set to 0
10/27/2011	8:36:17 AM	Helium valve closed
10/27/2011	8:36:17 AM	H2 valve closed
10/27/2011	8:36:17 AM	BCl3 valve closed
10/27/2011	8:36:17 AM	PH3 valve closed
10/27/2011	8:36:17 AM	SiCl4 pre valve closed
10/27/2011	8:36:17 AM	SiCl4 post valve closed
10/27/2011	8:36:17 AM	Main Vac valve closed
10/27/2011	8:36:17 AM	Bubbler valve closed
10/27/2011	8:36:17 AM	Bypass valve opened
10/27/2011	8:36:17 AM	Helium MFC set to  0.000000
10/27/2011	8:36:17 AM	H2 MFC set to  0.000000
10/27/2011	8:36:17 AM	BCl3 MFC set to  0.000000
10/27/2011	8:36:17 AM	PHl3 MFC set to  0.000000
10/27/2011	8:36:17 AM	SiCl4 MFC set to  0.000000
10/27/2011	8:36:17 AM	Bypass solenoid MFC set to  0.000000
10/27/2011	8:36:17 AM	Tube furnace set to 0
10/27/2011	8:37:17 AM	Helium valve closed
10/27/2011	8:37:17 AM	H2 valve closed
10/27/2011	8:37:17 AM	BCl3 valve closed
10/27/2011	8:37:17 AM	PH3 valve closed
10/27/2011	8:37:17 AM	SiCl4 pre valve closed
10/27/2011	8:37:17 AM	SiCl4 post valve closed
10/27/2011	8:37:17 AM	Bypass valve closed
10/27/2011	8:37:17 AM	Bubbler valve closed
10/27/2011	8:37:17 AM	Main Vac valve opened
10/27/2011	8:37:17 AM	Helium MFC set to  0.000000
10/27/2011	8:37:17 AM	H2 MFC set to  0.000000
10/27/2011	8:37:17 AM	BCl3 MFC set to  0.000000
10/27/2011	8:37:17 AM	PHl3 MFC set to  0.000000
10/27/2011	8:37:17 AM	SiCl4 MFC set to  0.000000
10/27/2011	8:37:17 AM	Bypass solenoid MFC set to  0.000000
10/27/2011	8:37:18 AM	Tube furnace set to 0
10/27/2011	8:37:19 AM	Run finished at 8:37 AM
10/27/2011	8:37:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/27/2011	8:43:16 AM	Tube furnace set to 100
10/27/2011	8:52:44 AM	Main Vac valve closed
10/27/2011	8:53:18 AM	Main Vac valve opened
10/27/2011	8:53:42 AM	Helium MFC set to  10.000000
10/27/2011	8:53:48 AM	Helium valve opened
10/27/2011	8:55:26 AM	Helium valve closed
10/27/2011	8:55:30 AM	Helium MFC set to  0.000000
10/27/2011	8:58:18 AM	Helium MFC set to  10.000000
10/27/2011	8:58:19 AM	Helium valve opened
10/27/2011	9:00:06 AM	Helium valve closed
10/27/2011	9:00:09 AM	Helium MFC set to  0.000000
10/27/2011	9:12:16 AM	Helium MFC set to  10.000000
10/27/2011	9:12:17 AM	Helium valve opened
10/27/2011	9:18:22 AM	Helium valve closed
10/27/2011	9:18:26 AM	Helium MFC set to  0.000000
10/27/2011	9:20:16 AM	Main Vac valve closed
10/27/2011	9:20:43 AM	Main Vac valve opened
10/27/2011	9:22:37 AM	Helium MFC set to  10.000000
10/27/2011	9:22:37 AM	Helium valve opened
10/27/2011	9:22:53 AM	Helium valve closed
10/27/2011	9:25:50 AM	Helium valve opened
10/27/2011	9:25:58 AM	Helium valve closed
10/27/2011	9:26:49 AM	Helium valve opened
10/27/2011	9:27:03 AM	Helium valve closed
10/27/2011	9:29:51 AM	Helium valve opened
10/27/2011	9:30:19 AM	Helium valve closed
10/27/2011	9:30:22 AM	Helium MFC set to  0.000000
10/27/2011	9:30:24 AM	Helium valve opened
10/27/2011	9:30:25 AM	Helium valve closed
10/27/2011	9:34:09 AM	Recipe started at 9:34 AM
10/27/2011	9:34:09 AM	Helium valve closed
10/27/2011	9:34:09 AM	H2 valve closed
10/27/2011	9:34:09 AM	BCl3 valve closed
10/27/2011	9:34:09 AM	PH3 valve closed
10/27/2011	9:34:09 AM	SiCl4 pre valve closed
10/27/2011	9:34:09 AM	SiCl4 post valve closed
10/27/2011	9:34:09 AM	Main Vac valve closed
10/27/2011	9:34:09 AM	Bypass valve closed
10/27/2011	9:34:09 AM	Bubbler valve closed
10/27/2011	9:34:09 AM	Helium MFC set to  0.000000
10/27/2011	9:34:09 AM	H2 MFC set to  0.000000
10/27/2011	9:34:09 AM	BCl3 MFC set to  0.000000
10/27/2011	9:34:09 AM	PHl3 MFC set to  0.000000
10/27/2011	9:34:09 AM	SiCl4 MFC set to  0.000000
10/27/2011	9:34:09 AM	Bypass solenoid MFC set to  0.000000
10/27/2011	9:34:09 AM	Tube furnace set to 0
10/27/2011	9:34:12 AM	Helium valve closed
10/27/2011	9:34:12 AM	BCl3 valve closed
10/27/2011	9:34:12 AM	PH3 valve closed
10/27/2011	9:34:12 AM	SiCl4 pre valve closed
10/27/2011	9:34:12 AM	SiCl4 post valve closed
10/27/2011	9:34:12 AM	Main Vac valve closed
10/27/2011	9:34:12 AM	Bypass valve closed
10/27/2011	9:34:12 AM	Bubbler valve closed
10/27/2011	9:34:12 AM	H2 valve opened
10/27/2011	9:34:12 AM	Helium MFC set to  0.000000
10/27/2011	9:34:12 AM	H2 MFC set to  500.000000
10/27/2011	9:34:12 AM	BCl3 MFC set to  0.000000
10/27/2011	9:34:12 AM	PHl3 MFC set to  0.000000
10/27/2011	9:34:12 AM	SiCl4 MFC set to  0.000000
10/27/2011	9:34:12 AM	Bypass solenoid MFC set to  0.000000
10/27/2011	9:34:12 AM	Tube furnace set to 100
10/27/2011	9:35:17 AM	Helium valve closed
10/27/2011	9:35:17 AM	BCl3 valve closed
10/27/2011	9:35:17 AM	PH3 valve closed
10/27/2011	9:35:17 AM	SiCl4 pre valve closed
10/27/2011	9:35:17 AM	SiCl4 post valve closed
10/27/2011	9:35:17 AM	Main Vac valve closed
10/27/2011	9:35:17 AM	Bypass valve closed
10/27/2011	9:35:17 AM	H2 valve opened
10/27/2011	9:35:17 AM	Bubbler valve opened
10/27/2011	9:35:17 AM	Helium MFC set to  0.000000
10/27/2011	9:35:17 AM	H2 MFC set to  500.000000
10/27/2011	9:35:17 AM	BCl3 MFC set to  0.000000
10/27/2011	9:35:17 AM	PHl3 MFC set to  0.000000
10/27/2011	9:35:17 AM	SiCl4 MFC set to  0.000000
10/27/2011	9:35:17 AM	Bypass solenoid MFC set to  0.000000
10/27/2011	9:35:17 AM	Tube furnace set to 100
10/27/2011	9:35:18 AM	Helium valve closed
10/27/2011	9:35:18 AM	BCl3 valve closed
10/27/2011	9:35:18 AM	PH3 valve closed
10/27/2011	9:35:18 AM	SiCl4 pre valve closed
10/27/2011	9:35:18 AM	SiCl4 post valve closed
10/27/2011	9:35:18 AM	Main Vac valve closed
10/27/2011	9:35:18 AM	Bypass valve closed
10/27/2011	9:35:18 AM	H2 valve opened
10/27/2011	9:35:18 AM	Bubbler valve opened
10/27/2011	9:35:18 AM	Helium MFC set to  0.000000
10/27/2011	9:35:18 AM	H2 MFC set to  500.000000
10/27/2011	9:35:18 AM	BCl3 MFC set to  0.000000
10/27/2011	9:35:18 AM	PHl3 MFC set to  0.000000
10/27/2011	9:35:18 AM	SiCl4 MFC set to  0.000000
10/27/2011	9:35:18 AM	Bypass solenoid MFC set to  0.000000
10/27/2011	9:35:18 AM	Tube furnace set to 1020
10/27/2011	10:00:18 AM	Helium valve closed
10/27/2011	10:00:18 AM	PH3 valve closed
10/27/2011	10:00:18 AM	Main Vac valve closed
10/27/2011	10:00:18 AM	Bypass valve closed
10/27/2011	10:00:18 AM	H2 valve opened
10/27/2011	10:00:18 AM	BCl3 valve opened
10/27/2011	10:00:18 AM	SiCl4 pre valve opened
10/27/2011	10:00:18 AM	SiCl4 post valve opened
10/27/2011	10:00:18 AM	Bubbler valve opened
10/27/2011	10:00:18 AM	Helium MFC set to  0.000000
10/27/2011	10:00:18 AM	H2 MFC set to  500.000000
10/27/2011	10:00:18 AM	BCl3 MFC set to  2.000000
10/27/2011	10:00:18 AM	PHl3 MFC set to  0.000000
10/27/2011	10:00:18 AM	SiCl4 MFC set to  50.000000
10/27/2011	10:00:18 AM	Bypass solenoid MFC set to  0.000000
10/27/2011	10:00:18 AM	Tube furnace set to 1048
10/27/2011	10:10:19 AM	Helium valve closed
10/27/2011	10:10:19 AM	BCl3 valve closed
10/27/2011	10:10:19 AM	PH3 valve closed
10/27/2011	10:10:19 AM	SiCl4 pre valve closed
10/27/2011	10:10:19 AM	SiCl4 post valve closed
10/27/2011	10:10:19 AM	Main Vac valve closed
10/27/2011	10:10:19 AM	Bypass valve closed
10/27/2011	10:10:19 AM	H2 valve opened
10/27/2011	10:10:19 AM	Bubbler valve opened
10/27/2011	10:10:19 AM	Helium MFC set to  0.000000
10/27/2011	10:10:19 AM	H2 MFC set to  500.000000
10/27/2011	10:10:19 AM	BCl3 MFC set to  0.000000
10/27/2011	10:10:19 AM	PHl3 MFC set to  0.000000
10/27/2011	10:10:19 AM	SiCl4 MFC set to  0.000000
10/27/2011	10:10:19 AM	Bypass solenoid MFC set to  0.000000
10/27/2011	10:10:19 AM	Tube furnace set to 750
10/27/2011	10:20:19 AM	H2 valve closed
10/27/2011	10:20:19 AM	BCl3 valve closed
10/27/2011	10:20:19 AM	PH3 valve closed
10/27/2011	10:20:19 AM	SiCl4 pre valve closed
10/27/2011	10:20:19 AM	SiCl4 post valve closed
10/27/2011	10:20:19 AM	Main Vac valve closed
10/27/2011	10:20:19 AM	Bypass valve closed
10/27/2011	10:20:19 AM	Helium valve opened
10/27/2011	10:20:19 AM	Bubbler valve opened
10/27/2011	10:20:19 AM	Helium MFC set to  400.000000
10/27/2011	10:20:19 AM	H2 MFC set to  0.000000
10/27/2011	10:20:19 AM	BCl3 MFC set to  0.000000
10/27/2011	10:20:19 AM	PHl3 MFC set to  0.000000
10/27/2011	10:20:19 AM	SiCl4 MFC set to  0.000000
10/27/2011	10:20:19 AM	Bypass solenoid MFC set to  0.000000
10/27/2011	10:20:19 AM	Tube furnace set to 0
10/27/2011	10:40:19 AM	Helium valve closed
10/27/2011	10:40:19 AM	H2 valve closed
10/27/2011	10:40:19 AM	BCl3 valve closed
10/27/2011	10:40:19 AM	PH3 valve closed
10/27/2011	10:40:19 AM	SiCl4 pre valve closed
10/27/2011	10:40:19 AM	SiCl4 post valve closed
10/27/2011	10:40:19 AM	Main Vac valve closed
10/27/2011	10:40:19 AM	Bypass valve closed
10/27/2011	10:40:19 AM	Bubbler valve closed
10/27/2011	10:40:19 AM	Helium MFC set to  0.000000
10/27/2011	10:40:19 AM	H2 MFC set to  0.000000
10/27/2011	10:40:19 AM	BCl3 MFC set to  0.000000
10/27/2011	10:40:19 AM	PHl3 MFC set to  0.000000
10/27/2011	10:40:19 AM	SiCl4 MFC set to  0.000000
10/27/2011	10:40:19 AM	Bypass solenoid MFC set to  0.000000
10/27/2011	10:40:19 AM	Tube furnace set to 0
10/27/2011	10:50:53 AM	Run finished at 10:50 AM
10/27/2011	10:50:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/27/2011	10:50:56 AM	Recipe started at 10:50 AM
10/27/2011	10:50:56 AM	Helium valve closed
10/27/2011	10:50:56 AM	H2 valve closed
10/27/2011	10:50:56 AM	BCl3 valve closed
10/27/2011	10:50:56 AM	PH3 valve closed
10/27/2011	10:50:56 AM	SiCl4 pre valve closed
10/27/2011	10:50:56 AM	SiCl4 post valve closed
10/27/2011	10:50:56 AM	Main Vac valve closed
10/27/2011	10:50:56 AM	Bubbler valve closed
10/27/2011	10:50:56 AM	Bypass valve opened
10/27/2011	10:50:56 AM	Helium MFC set to  0.000000
10/27/2011	10:50:56 AM	H2 MFC set to  0.000000
10/27/2011	10:50:56 AM	BCl3 MFC set to  0.000000
10/27/2011	10:50:56 AM	PHl3 MFC set to  0.000000
10/27/2011	10:50:56 AM	SiCl4 MFC set to  0.000000
10/27/2011	10:50:56 AM	Bypass solenoid MFC set to  0.000000
10/27/2011	10:50:56 AM	Tube furnace set to 0
10/27/2011	10:51:56 AM	Helium valve closed
10/27/2011	10:51:56 AM	H2 valve closed
10/27/2011	10:51:56 AM	BCl3 valve closed
10/27/2011	10:51:56 AM	PH3 valve closed
10/27/2011	10:51:56 AM	SiCl4 pre valve closed
10/27/2011	10:51:56 AM	SiCl4 post valve closed
10/27/2011	10:51:56 AM	Main Vac valve closed
10/27/2011	10:51:56 AM	Bubbler valve closed
10/27/2011	10:51:56 AM	Bypass valve opened
10/27/2011	10:51:56 AM	Helium MFC set to  0.000000
10/27/2011	10:51:56 AM	H2 MFC set to  0.000000
10/27/2011	10:51:56 AM	BCl3 MFC set to  0.000000
10/27/2011	10:51:56 AM	PHl3 MFC set to  0.000000
10/27/2011	10:51:56 AM	SiCl4 MFC set to  0.000000
10/27/2011	10:51:56 AM	Bypass solenoid MFC set to  0.000000
10/27/2011	10:51:56 AM	Tube furnace set to 0
10/27/2011	10:52:56 AM	Helium valve closed
10/27/2011	10:52:56 AM	H2 valve closed
10/27/2011	10:52:56 AM	BCl3 valve closed
10/27/2011	10:52:56 AM	PH3 valve closed
10/27/2011	10:52:56 AM	SiCl4 pre valve closed
10/27/2011	10:52:56 AM	SiCl4 post valve closed
10/27/2011	10:52:56 AM	Bypass valve closed
10/27/2011	10:52:56 AM	Bubbler valve closed
10/27/2011	10:52:56 AM	Main Vac valve opened
10/27/2011	10:52:56 AM	Helium MFC set to  0.000000
10/27/2011	10:52:56 AM	H2 MFC set to  0.000000
10/27/2011	10:52:56 AM	BCl3 MFC set to  0.000000
10/27/2011	10:52:56 AM	PHl3 MFC set to  0.000000
10/27/2011	10:52:56 AM	SiCl4 MFC set to  0.000000
10/27/2011	10:52:56 AM	Bypass solenoid MFC set to  0.000000
10/27/2011	10:52:56 AM	Tube furnace set to 0
10/27/2011	10:52:57 AM	Run finished at 10:52 AM
10/27/2011	10:52:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/27/2011	10:53:22 AM	Tube furnace set to 100
10/27/2011	11:19:29 AM	Main Vac valve closed
10/27/2011	11:19:50 AM	Main Vac valve opened
10/27/2011	11:19:58 AM	Helium MFC set to  10.000000
10/27/2011	11:20:22 AM	Helium valve opened
10/27/2011	11:31:36 AM	Helium valve closed
10/27/2011	11:31:40 AM	Helium MFC set to  0.000000
10/27/2011	11:32:18 AM	Main Vac valve closed
10/27/2011	11:32:40 AM	Main Vac valve opened
10/27/2011	11:32:40 AM	Main Vac valve closed
10/27/2011	11:32:41 AM	Main Vac valve opened
10/27/2011	11:32:48 AM	Helium MFC set to  5.000000
10/27/2011	11:32:49 AM	Helium valve opened
10/27/2011	11:33:13 AM	Helium valve closed
10/27/2011	11:33:16 AM	Helium MFC set to  0.000000
10/27/2011	11:36:29 AM	Main Vac valve closed
10/27/2011	11:36:49 AM	Main Vac valve opened
10/27/2011	11:39:11 AM	Recipe started at 11:39 AM
10/27/2011	11:39:11 AM	Helium valve closed
10/27/2011	11:39:11 AM	H2 valve closed
10/27/2011	11:39:11 AM	BCl3 valve closed
10/27/2011	11:39:11 AM	PH3 valve closed
10/27/2011	11:39:11 AM	SiCl4 pre valve closed
10/27/2011	11:39:11 AM	SiCl4 post valve closed
10/27/2011	11:39:11 AM	Main Vac valve closed
10/27/2011	11:39:11 AM	Bypass valve closed
10/27/2011	11:39:11 AM	Bubbler valve closed
10/27/2011	11:39:11 AM	Helium MFC set to  0.000000
10/27/2011	11:39:11 AM	H2 MFC set to  0.000000
10/27/2011	11:39:11 AM	BCl3 MFC set to  0.000000
10/27/2011	11:39:11 AM	PHl3 MFC set to  0.000000
10/27/2011	11:39:11 AM	SiCl4 MFC set to  0.000000
10/27/2011	11:39:11 AM	Bypass solenoid MFC set to  0.000000
10/27/2011	11:39:11 AM	Tube furnace set to 0
10/27/2011	11:39:14 AM	Helium valve closed
10/27/2011	11:39:14 AM	BCl3 valve closed
10/27/2011	11:39:14 AM	PH3 valve closed
10/27/2011	11:39:14 AM	SiCl4 pre valve closed
10/27/2011	11:39:14 AM	SiCl4 post valve closed
10/27/2011	11:39:14 AM	Main Vac valve closed
10/27/2011	11:39:14 AM	Bypass valve closed
10/27/2011	11:39:14 AM	Bubbler valve closed
10/27/2011	11:39:14 AM	H2 valve opened
10/27/2011	11:39:14 AM	Helium MFC set to  0.000000
10/27/2011	11:39:14 AM	H2 MFC set to  500.000000
10/27/2011	11:39:14 AM	BCl3 MFC set to  0.000000
10/27/2011	11:39:14 AM	PHl3 MFC set to  0.000000
10/27/2011	11:39:14 AM	SiCl4 MFC set to  0.000000
10/27/2011	11:39:14 AM	Bypass solenoid MFC set to  0.000000
10/27/2011	11:39:14 AM	Tube furnace set to 100
10/27/2011	11:40:19 AM	Helium valve closed
10/27/2011	11:40:19 AM	BCl3 valve closed
10/27/2011	11:40:19 AM	PH3 valve closed
10/27/2011	11:40:19 AM	SiCl4 pre valve closed
10/27/2011	11:40:19 AM	SiCl4 post valve closed
10/27/2011	11:40:19 AM	Main Vac valve closed
10/27/2011	11:40:19 AM	Bypass valve closed
10/27/2011	11:40:19 AM	H2 valve opened
10/27/2011	11:40:19 AM	Bubbler valve opened
10/27/2011	11:40:19 AM	Helium MFC set to  0.000000
10/27/2011	11:40:19 AM	H2 MFC set to  500.000000
10/27/2011	11:40:19 AM	BCl3 MFC set to  0.000000
10/27/2011	11:40:19 AM	PHl3 MFC set to  0.000000
10/27/2011	11:40:19 AM	SiCl4 MFC set to  0.000000
10/27/2011	11:40:19 AM	Bypass solenoid MFC set to  0.000000
10/27/2011	11:40:20 AM	Tube furnace set to 100
10/27/2011	11:40:21 AM	Helium valve closed
10/27/2011	11:40:21 AM	BCl3 valve closed
10/27/2011	11:40:21 AM	PH3 valve closed
10/27/2011	11:40:21 AM	SiCl4 pre valve closed
10/27/2011	11:40:21 AM	SiCl4 post valve closed
10/27/2011	11:40:21 AM	Main Vac valve closed
10/27/2011	11:40:21 AM	Bypass valve closed
10/27/2011	11:40:21 AM	H2 valve opened
10/27/2011	11:40:21 AM	Bubbler valve opened
10/27/2011	11:40:21 AM	Helium MFC set to  0.000000
10/27/2011	11:40:21 AM	H2 MFC set to  500.000000
10/27/2011	11:40:21 AM	BCl3 MFC set to  0.000000
10/27/2011	11:40:21 AM	PHl3 MFC set to  0.000000
10/27/2011	11:40:21 AM	SiCl4 MFC set to  0.000000
10/27/2011	11:40:21 AM	Bypass solenoid MFC set to  0.000000
10/27/2011	11:40:21 AM	Tube furnace set to 1010
10/27/2011	12:05:21 PM	Helium valve closed
10/27/2011	12:05:21 PM	PH3 valve closed
10/27/2011	12:05:21 PM	Main Vac valve closed
10/27/2011	12:05:21 PM	Bypass valve closed
10/27/2011	12:05:21 PM	H2 valve opened
10/27/2011	12:05:21 PM	BCl3 valve opened
10/27/2011	12:05:21 PM	SiCl4 pre valve opened
10/27/2011	12:05:21 PM	SiCl4 post valve opened
10/27/2011	12:05:21 PM	Bubbler valve opened
10/27/2011	12:05:21 PM	Helium MFC set to  0.000000
10/27/2011	12:05:21 PM	H2 MFC set to  500.000000
10/27/2011	12:05:21 PM	BCl3 MFC set to  2.000000
10/27/2011	12:05:21 PM	PHl3 MFC set to  0.000000
10/27/2011	12:05:21 PM	SiCl4 MFC set to  50.000000
10/27/2011	12:05:21 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	12:05:21 PM	Tube furnace set to 1048
10/27/2011	12:15:21 PM	Helium valve closed
10/27/2011	12:15:21 PM	BCl3 valve closed
10/27/2011	12:15:21 PM	PH3 valve closed
10/27/2011	12:15:21 PM	SiCl4 pre valve closed
10/27/2011	12:15:21 PM	SiCl4 post valve closed
10/27/2011	12:15:21 PM	Main Vac valve closed
10/27/2011	12:15:21 PM	Bypass valve closed
10/27/2011	12:15:21 PM	H2 valve opened
10/27/2011	12:15:21 PM	Bubbler valve opened
10/27/2011	12:15:21 PM	Helium MFC set to  0.000000
10/27/2011	12:15:21 PM	H2 MFC set to  500.000000
10/27/2011	12:15:21 PM	BCl3 MFC set to  0.000000
10/27/2011	12:15:21 PM	PHl3 MFC set to  0.000000
10/27/2011	12:15:21 PM	SiCl4 MFC set to  0.000000
10/27/2011	12:15:21 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	12:15:21 PM	Tube furnace set to 750
10/27/2011	12:25:21 PM	H2 valve closed
10/27/2011	12:25:21 PM	BCl3 valve closed
10/27/2011	12:25:21 PM	PH3 valve closed
10/27/2011	12:25:21 PM	SiCl4 pre valve closed
10/27/2011	12:25:21 PM	SiCl4 post valve closed
10/27/2011	12:25:21 PM	Main Vac valve closed
10/27/2011	12:25:21 PM	Bypass valve closed
10/27/2011	12:25:21 PM	Helium valve opened
10/27/2011	12:25:21 PM	Bubbler valve opened
10/27/2011	12:25:21 PM	Helium MFC set to  400.000000
10/27/2011	12:25:21 PM	H2 MFC set to  0.000000
10/27/2011	12:25:21 PM	BCl3 MFC set to  0.000000
10/27/2011	12:25:21 PM	PHl3 MFC set to  0.000000
10/27/2011	12:25:21 PM	SiCl4 MFC set to  0.000000
10/27/2011	12:25:21 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	12:25:21 PM	Tube furnace set to 0
10/27/2011	12:45:21 PM	Helium valve closed
10/27/2011	12:45:21 PM	H2 valve closed
10/27/2011	12:45:21 PM	BCl3 valve closed
10/27/2011	12:45:21 PM	PH3 valve closed
10/27/2011	12:45:21 PM	SiCl4 pre valve closed
10/27/2011	12:45:21 PM	SiCl4 post valve closed
10/27/2011	12:45:21 PM	Main Vac valve closed
10/27/2011	12:45:21 PM	Bypass valve closed
10/27/2011	12:45:21 PM	Bubbler valve closed
10/27/2011	12:45:21 PM	Helium MFC set to  0.000000
10/27/2011	12:45:21 PM	H2 MFC set to  0.000000
10/27/2011	12:45:21 PM	BCl3 MFC set to  0.000000
10/27/2011	12:45:21 PM	PHl3 MFC set to  0.000000
10/27/2011	12:45:21 PM	SiCl4 MFC set to  0.000000
10/27/2011	12:45:21 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	12:45:21 PM	Tube furnace set to 0
10/27/2011	12:46:24 PM	Run finished at 12:46 PM
10/27/2011	12:50:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/27/2011	12:50:10 PM	Recipe started at 12:50 PM
10/27/2011	12:50:10 PM	Helium valve closed
10/27/2011	12:50:10 PM	H2 valve closed
10/27/2011	12:50:10 PM	BCl3 valve closed
10/27/2011	12:50:10 PM	PH3 valve closed
10/27/2011	12:50:10 PM	SiCl4 pre valve closed
10/27/2011	12:50:10 PM	SiCl4 post valve closed
10/27/2011	12:50:10 PM	Main Vac valve closed
10/27/2011	12:50:10 PM	Bubbler valve closed
10/27/2011	12:50:10 PM	Bypass valve opened
10/27/2011	12:50:10 PM	Helium MFC set to  0.000000
10/27/2011	12:50:10 PM	H2 MFC set to  0.000000
10/27/2011	12:50:10 PM	BCl3 MFC set to  0.000000
10/27/2011	12:50:10 PM	PHl3 MFC set to  0.000000
10/27/2011	12:50:10 PM	SiCl4 MFC set to  0.000000
10/27/2011	12:50:10 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	12:50:10 PM	Tube furnace set to 0
10/27/2011	12:51:13 PM	Helium valve closed
10/27/2011	12:51:13 PM	H2 valve closed
10/27/2011	12:51:13 PM	BCl3 valve closed
10/27/2011	12:51:13 PM	PH3 valve closed
10/27/2011	12:51:13 PM	SiCl4 pre valve closed
10/27/2011	12:51:13 PM	SiCl4 post valve closed
10/27/2011	12:51:13 PM	Main Vac valve closed
10/27/2011	12:51:13 PM	Bubbler valve closed
10/27/2011	12:51:13 PM	Bypass valve opened
10/27/2011	12:51:13 PM	Helium MFC set to  0.000000
10/27/2011	12:51:13 PM	H2 MFC set to  0.000000
10/27/2011	12:51:13 PM	BCl3 MFC set to  0.000000
10/27/2011	12:51:13 PM	PHl3 MFC set to  0.000000
10/27/2011	12:51:13 PM	SiCl4 MFC set to  0.000000
10/27/2011	12:51:13 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	12:51:13 PM	Tube furnace set to 0
10/27/2011	12:52:13 PM	Helium valve closed
10/27/2011	12:52:13 PM	H2 valve closed
10/27/2011	12:52:13 PM	BCl3 valve closed
10/27/2011	12:52:13 PM	PH3 valve closed
10/27/2011	12:52:13 PM	SiCl4 pre valve closed
10/27/2011	12:52:13 PM	SiCl4 post valve closed
10/27/2011	12:52:13 PM	Bypass valve closed
10/27/2011	12:52:13 PM	Bubbler valve closed
10/27/2011	12:52:13 PM	Main Vac valve opened
10/27/2011	12:52:13 PM	Helium MFC set to  0.000000
10/27/2011	12:52:13 PM	H2 MFC set to  0.000000
10/27/2011	12:52:13 PM	BCl3 MFC set to  0.000000
10/27/2011	12:52:13 PM	PHl3 MFC set to  0.000000
10/27/2011	12:52:13 PM	SiCl4 MFC set to  0.000000
10/27/2011	12:52:13 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	12:52:13 PM	Tube furnace set to 0
10/27/2011	12:52:14 PM	Run finished at 12:52 PM
10/27/2011	12:52:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/27/2011	1:30:45 PM	Helium MFC set to  10.000000
10/27/2011	1:30:45 PM	Helium valve opened
10/27/2011	1:33:07 PM	Helium valve closed
10/27/2011	1:33:09 PM	Helium MFC set to  0.000000
10/27/2011	1:37:28 PM	Main Vac valve closed
10/27/2011	1:37:53 PM	Main Vac valve opened
10/27/2011	1:38:11 PM	Main Vac valve closed
10/27/2011	1:38:15 PM	Helium MFC set to  20.000000
10/27/2011	1:38:16 PM	Helium valve opened
10/27/2011	1:38:21 PM	Helium valve closed
10/27/2011	1:38:31 PM	Main Vac valve opened
10/27/2011	1:38:37 PM	Helium MFC set to  10.000000
10/27/2011	1:38:39 PM	Helium valve opened
10/27/2011	1:38:47 PM	Helium MFC set to  20.000000
10/27/2011	1:39:00 PM	Helium MFC set to  0.000000
10/27/2011	1:39:00 PM	Helium valve closed
10/27/2011	1:42:07 PM	Main Vac valve closed
10/27/2011	1:42:25 PM	Main Vac valve opened
10/27/2011	1:43:43 PM	Recipe started at 1:43 PM
10/27/2011	1:43:43 PM	Helium valve closed
10/27/2011	1:43:43 PM	H2 valve closed
10/27/2011	1:43:43 PM	BCl3 valve closed
10/27/2011	1:43:43 PM	PH3 valve closed
10/27/2011	1:43:43 PM	SiCl4 pre valve closed
10/27/2011	1:43:43 PM	SiCl4 post valve closed
10/27/2011	1:43:43 PM	Main Vac valve closed
10/27/2011	1:43:43 PM	Bypass valve closed
10/27/2011	1:43:43 PM	Bubbler valve closed
10/27/2011	1:43:43 PM	Helium MFC set to  0.000000
10/27/2011	1:43:43 PM	H2 MFC set to  0.000000
10/27/2011	1:43:43 PM	BCl3 MFC set to  0.000000
10/27/2011	1:43:43 PM	PHl3 MFC set to  0.000000
10/27/2011	1:43:43 PM	SiCl4 MFC set to  0.000000
10/27/2011	1:43:43 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	1:43:43 PM	Tube furnace set to 0
10/27/2011	1:43:46 PM	Helium valve closed
10/27/2011	1:43:46 PM	BCl3 valve closed
10/27/2011	1:43:46 PM	PH3 valve closed
10/27/2011	1:43:46 PM	SiCl4 pre valve closed
10/27/2011	1:43:46 PM	SiCl4 post valve closed
10/27/2011	1:43:46 PM	Main Vac valve closed
10/27/2011	1:43:46 PM	Bypass valve closed
10/27/2011	1:43:46 PM	Bubbler valve closed
10/27/2011	1:43:46 PM	H2 valve opened
10/27/2011	1:43:46 PM	Helium MFC set to  0.000000
10/27/2011	1:43:46 PM	H2 MFC set to  500.000000
10/27/2011	1:43:46 PM	BCl3 MFC set to  0.000000
10/27/2011	1:43:46 PM	PHl3 MFC set to  0.000000
10/27/2011	1:43:46 PM	SiCl4 MFC set to  0.000000
10/27/2011	1:43:46 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	1:43:46 PM	Tube furnace set to 100
10/27/2011	1:44:50 PM	Helium valve closed
10/27/2011	1:44:50 PM	BCl3 valve closed
10/27/2011	1:44:50 PM	PH3 valve closed
10/27/2011	1:44:50 PM	SiCl4 pre valve closed
10/27/2011	1:44:50 PM	SiCl4 post valve closed
10/27/2011	1:44:50 PM	Main Vac valve closed
10/27/2011	1:44:50 PM	Bypass valve closed
10/27/2011	1:44:50 PM	H2 valve opened
10/27/2011	1:44:50 PM	Bubbler valve opened
10/27/2011	1:44:50 PM	Helium MFC set to  0.000000
10/27/2011	1:44:50 PM	H2 MFC set to  500.000000
10/27/2011	1:44:50 PM	BCl3 MFC set to  0.000000
10/27/2011	1:44:50 PM	PHl3 MFC set to  0.000000
10/27/2011	1:44:50 PM	SiCl4 MFC set to  0.000000
10/27/2011	1:44:50 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	1:44:51 PM	Tube furnace set to 100
10/27/2011	1:44:52 PM	Helium valve closed
10/27/2011	1:44:52 PM	BCl3 valve closed
10/27/2011	1:44:52 PM	PH3 valve closed
10/27/2011	1:44:52 PM	SiCl4 pre valve closed
10/27/2011	1:44:52 PM	SiCl4 post valve closed
10/27/2011	1:44:52 PM	Main Vac valve closed
10/27/2011	1:44:52 PM	Bypass valve closed
10/27/2011	1:44:52 PM	H2 valve opened
10/27/2011	1:44:52 PM	Bubbler valve opened
10/27/2011	1:44:52 PM	Helium MFC set to  0.000000
10/27/2011	1:44:52 PM	H2 MFC set to  500.000000
10/27/2011	1:44:52 PM	BCl3 MFC set to  0.000000
10/27/2011	1:44:52 PM	PHl3 MFC set to  0.000000
10/27/2011	1:44:52 PM	SiCl4 MFC set to  0.000000
10/27/2011	1:44:52 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	1:44:52 PM	Tube furnace set to 1020
10/27/2011	2:09:52 PM	Helium valve closed
10/27/2011	2:09:52 PM	PH3 valve closed
10/27/2011	2:09:52 PM	Main Vac valve closed
10/27/2011	2:09:52 PM	Bypass valve closed
10/27/2011	2:09:52 PM	H2 valve opened
10/27/2011	2:09:52 PM	BCl3 valve opened
10/27/2011	2:09:52 PM	SiCl4 pre valve opened
10/27/2011	2:09:52 PM	SiCl4 post valve opened
10/27/2011	2:09:52 PM	Bubbler valve opened
10/27/2011	2:09:52 PM	Helium MFC set to  0.000000
10/27/2011	2:09:52 PM	H2 MFC set to  500.000000
10/27/2011	2:09:52 PM	BCl3 MFC set to  2.000000
10/27/2011	2:09:52 PM	PHl3 MFC set to  0.000000
10/27/2011	2:09:52 PM	SiCl4 MFC set to  50.000000
10/27/2011	2:09:52 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	2:09:52 PM	Tube furnace set to 1020
10/27/2011	2:19:52 PM	Helium valve closed
10/27/2011	2:19:52 PM	BCl3 valve closed
10/27/2011	2:19:52 PM	PH3 valve closed
10/27/2011	2:19:52 PM	SiCl4 pre valve closed
10/27/2011	2:19:52 PM	SiCl4 post valve closed
10/27/2011	2:19:52 PM	Main Vac valve closed
10/27/2011	2:19:52 PM	Bypass valve closed
10/27/2011	2:19:52 PM	H2 valve opened
10/27/2011	2:19:52 PM	Bubbler valve opened
10/27/2011	2:19:52 PM	Helium MFC set to  0.000000
10/27/2011	2:19:52 PM	H2 MFC set to  500.000000
10/27/2011	2:19:52 PM	BCl3 MFC set to  0.000000
10/27/2011	2:19:52 PM	PHl3 MFC set to  0.000000
10/27/2011	2:19:52 PM	SiCl4 MFC set to  0.000000
10/27/2011	2:19:52 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	2:19:52 PM	Tube furnace set to 750
10/27/2011	2:29:52 PM	H2 valve closed
10/27/2011	2:29:52 PM	BCl3 valve closed
10/27/2011	2:29:52 PM	PH3 valve closed
10/27/2011	2:29:52 PM	SiCl4 pre valve closed
10/27/2011	2:29:52 PM	SiCl4 post valve closed
10/27/2011	2:29:52 PM	Main Vac valve closed
10/27/2011	2:29:52 PM	Bypass valve closed
10/27/2011	2:29:52 PM	Helium valve opened
10/27/2011	2:29:52 PM	Bubbler valve opened
10/27/2011	2:29:52 PM	Helium MFC set to  400.000000
10/27/2011	2:29:52 PM	H2 MFC set to  0.000000
10/27/2011	2:29:52 PM	BCl3 MFC set to  0.000000
10/27/2011	2:29:52 PM	PHl3 MFC set to  0.000000
10/27/2011	2:29:52 PM	SiCl4 MFC set to  0.000000
10/27/2011	2:29:52 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	2:29:52 PM	Tube furnace set to 0
10/27/2011	2:49:52 PM	Helium valve closed
10/27/2011	2:49:52 PM	H2 valve closed
10/27/2011	2:49:53 PM	BCl3 valve closed
10/27/2011	2:49:53 PM	PH3 valve closed
10/27/2011	2:49:53 PM	SiCl4 pre valve closed
10/27/2011	2:49:53 PM	SiCl4 post valve closed
10/27/2011	2:49:53 PM	Main Vac valve closed
10/27/2011	2:49:53 PM	Bypass valve closed
10/27/2011	2:49:53 PM	Bubbler valve closed
10/27/2011	2:49:53 PM	Helium MFC set to  0.000000
10/27/2011	2:49:53 PM	H2 MFC set to  0.000000
10/27/2011	2:49:53 PM	BCl3 MFC set to  0.000000
10/27/2011	2:49:53 PM	PHl3 MFC set to  0.000000
10/27/2011	2:49:53 PM	SiCl4 MFC set to  0.000000
10/27/2011	2:49:53 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	2:49:53 PM	Tube furnace set to 0
10/27/2011	2:59:47 PM	Run finished at 2:59 PM
10/27/2011	2:59:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/27/2011	2:59:51 PM	Recipe started at 2:59 PM
10/27/2011	2:59:51 PM	Helium valve closed
10/27/2011	2:59:51 PM	H2 valve closed
10/27/2011	2:59:52 PM	BCl3 valve closed
10/27/2011	2:59:52 PM	PH3 valve closed
10/27/2011	2:59:52 PM	SiCl4 pre valve closed
10/27/2011	2:59:52 PM	SiCl4 post valve closed
10/27/2011	2:59:52 PM	Main Vac valve closed
10/27/2011	2:59:52 PM	Bypass valve closed
10/27/2011	2:59:52 PM	Bubbler valve closed
10/27/2011	2:59:52 PM	Helium MFC set to  0.000000
10/27/2011	2:59:52 PM	H2 MFC set to  0.000000
10/27/2011	2:59:52 PM	BCl3 MFC set to  0.000000
10/27/2011	2:59:52 PM	PHl3 MFC set to  0.000000
10/27/2011	2:59:52 PM	SiCl4 MFC set to  0.000000
10/27/2011	2:59:52 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	2:59:52 PM	Tube furnace set to 0
10/27/2011	2:59:55 PM	H2 valve closed
10/27/2011	2:59:55 PM	BCl3 valve closed
10/27/2011	2:59:55 PM	PH3 valve closed
10/27/2011	2:59:55 PM	SiCl4 pre valve closed
10/27/2011	2:59:55 PM	SiCl4 post valve closed
10/27/2011	2:59:55 PM	Main Vac valve closed
10/27/2011	2:59:55 PM	Bypass valve closed
10/27/2011	2:59:55 PM	Bubbler valve closed
10/27/2011	2:59:55 PM	Helium valve opened
10/27/2011	2:59:55 PM	Helium MFC set to  500.000000
10/27/2011	2:59:55 PM	H2 MFC set to  0.000000
10/27/2011	2:59:55 PM	BCl3 MFC set to  0.000000
10/27/2011	2:59:55 PM	PHl3 MFC set to  0.000000
10/27/2011	2:59:55 PM	SiCl4 MFC set to  0.000000
10/27/2011	2:59:55 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	2:59:55 PM	Tube furnace set to 0
10/27/2011	2:59:56 PM	Helium valve closed
10/27/2011	2:59:56 PM	H2 valve closed
10/27/2011	2:59:56 PM	BCl3 valve closed
10/27/2011	2:59:56 PM	PH3 valve closed
10/27/2011	2:59:56 PM	SiCl4 pre valve closed
10/27/2011	2:59:56 PM	SiCl4 post valve closed
10/27/2011	2:59:56 PM	Main Vac valve closed
10/27/2011	2:59:56 PM	Bypass valve closed
10/27/2011	2:59:56 PM	Bubbler valve closed
10/27/2011	2:59:56 PM	Helium MFC set to  0.000000
10/27/2011	2:59:56 PM	H2 MFC set to  0.000000
10/27/2011	2:59:56 PM	BCl3 MFC set to  0.000000
10/27/2011	2:59:56 PM	PHl3 MFC set to  0.000000
10/27/2011	2:59:56 PM	SiCl4 MFC set to  0.000000
10/27/2011	2:59:56 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	2:59:56 PM	Tube furnace set to 0
10/27/2011	2:59:57 PM	Run finished at 2:59 PM
10/27/2011	2:59:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/27/2011	3:04:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/27/2011	3:04:19 PM	Recipe started at 3:04 PM
10/27/2011	3:04:19 PM	Helium valve closed
10/27/2011	3:04:19 PM	H2 valve closed
10/27/2011	3:04:19 PM	BCl3 valve closed
10/27/2011	3:04:19 PM	PH3 valve closed
10/27/2011	3:04:19 PM	SiCl4 pre valve closed
10/27/2011	3:04:19 PM	SiCl4 post valve closed
10/27/2011	3:04:19 PM	Main Vac valve closed
10/27/2011	3:04:19 PM	Bypass valve closed
10/27/2011	3:04:19 PM	Bubbler valve closed
10/27/2011	3:04:19 PM	Helium MFC set to  0.000000
10/27/2011	3:04:19 PM	H2 MFC set to  0.000000
10/27/2011	3:04:19 PM	BCl3 MFC set to  0.000000
10/27/2011	3:04:19 PM	PHl3 MFC set to  0.000000
10/27/2011	3:04:19 PM	SiCl4 MFC set to  0.000000
10/27/2011	3:04:19 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	3:04:20 PM	Tube furnace set to 0
10/27/2011	3:04:23 PM	H2 valve closed
10/27/2011	3:04:23 PM	BCl3 valve closed
10/27/2011	3:04:23 PM	PH3 valve closed
10/27/2011	3:04:23 PM	SiCl4 pre valve closed
10/27/2011	3:04:23 PM	SiCl4 post valve closed
10/27/2011	3:04:23 PM	Main Vac valve closed
10/27/2011	3:04:23 PM	Bypass valve closed
10/27/2011	3:04:23 PM	Bubbler valve closed
10/27/2011	3:04:23 PM	Helium valve opened
10/27/2011	3:04:23 PM	Helium MFC set to  500.000000
10/27/2011	3:04:23 PM	H2 MFC set to  0.000000
10/27/2011	3:04:23 PM	BCl3 MFC set to  0.000000
10/27/2011	3:04:23 PM	PHl3 MFC set to  0.000000
10/27/2011	3:04:23 PM	SiCl4 MFC set to  0.000000
10/27/2011	3:04:23 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	3:04:23 PM	Tube furnace set to 0
10/27/2011	3:04:23 PM	Helium valve closed
10/27/2011	3:04:23 PM	H2 valve closed
10/27/2011	3:04:23 PM	BCl3 valve closed
10/27/2011	3:04:23 PM	PH3 valve closed
10/27/2011	3:04:23 PM	SiCl4 pre valve closed
10/27/2011	3:04:23 PM	SiCl4 post valve closed
10/27/2011	3:04:23 PM	Main Vac valve closed
10/27/2011	3:04:23 PM	Bypass valve closed
10/27/2011	3:04:23 PM	Bubbler valve closed
10/27/2011	3:04:23 PM	Helium MFC set to  0.000000
10/27/2011	3:04:23 PM	H2 MFC set to  0.000000
10/27/2011	3:04:23 PM	BCl3 MFC set to  0.000000
10/27/2011	3:04:23 PM	PHl3 MFC set to  0.000000
10/27/2011	3:04:23 PM	SiCl4 MFC set to  0.000000
10/27/2011	3:04:23 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	3:04:24 PM	Tube furnace set to 0
10/27/2011	3:04:25 PM	Run finished at 3:04 PM
10/27/2011	3:04:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/27/2011	3:06:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/27/2011	3:06:42 PM	Recipe started at 3:06 PM
10/27/2011	3:06:42 PM	Helium valve closed
10/27/2011	3:06:42 PM	H2 valve closed
10/27/2011	3:06:42 PM	BCl3 valve closed
10/27/2011	3:06:42 PM	PH3 valve closed
10/27/2011	3:06:42 PM	SiCl4 pre valve closed
10/27/2011	3:06:42 PM	SiCl4 post valve closed
10/27/2011	3:06:42 PM	Main Vac valve closed
10/27/2011	3:06:42 PM	Bubbler valve closed
10/27/2011	3:06:42 PM	Bypass valve opened
10/27/2011	3:06:42 PM	Helium MFC set to  0.000000
10/27/2011	3:06:42 PM	H2 MFC set to  0.000000
10/27/2011	3:06:42 PM	BCl3 MFC set to  0.000000
10/27/2011	3:06:42 PM	PHl3 MFC set to  0.000000
10/27/2011	3:06:42 PM	SiCl4 MFC set to  0.000000
10/27/2011	3:06:42 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	3:06:42 PM	Tube furnace set to 0
10/27/2011	3:07:42 PM	Helium valve closed
10/27/2011	3:07:42 PM	H2 valve closed
10/27/2011	3:07:42 PM	BCl3 valve closed
10/27/2011	3:07:42 PM	PH3 valve closed
10/27/2011	3:07:42 PM	SiCl4 pre valve closed
10/27/2011	3:07:42 PM	SiCl4 post valve closed
10/27/2011	3:07:42 PM	Main Vac valve closed
10/27/2011	3:07:42 PM	Bubbler valve closed
10/27/2011	3:07:42 PM	Bypass valve opened
10/27/2011	3:07:42 PM	Helium MFC set to  0.000000
10/27/2011	3:07:42 PM	H2 MFC set to  0.000000
10/27/2011	3:07:42 PM	BCl3 MFC set to  0.000000
10/27/2011	3:07:42 PM	PHl3 MFC set to  0.000000
10/27/2011	3:07:42 PM	SiCl4 MFC set to  0.000000
10/27/2011	3:07:42 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	3:07:43 PM	Tube furnace set to 0
10/27/2011	3:08:43 PM	Helium valve closed
10/27/2011	3:08:43 PM	H2 valve closed
10/27/2011	3:08:43 PM	BCl3 valve closed
10/27/2011	3:08:43 PM	PH3 valve closed
10/27/2011	3:08:43 PM	SiCl4 pre valve closed
10/27/2011	3:08:43 PM	SiCl4 post valve closed
10/27/2011	3:08:43 PM	Bypass valve closed
10/27/2011	3:08:43 PM	Bubbler valve closed
10/27/2011	3:08:43 PM	Main Vac valve opened
10/27/2011	3:08:43 PM	Helium MFC set to  0.000000
10/27/2011	3:08:43 PM	H2 MFC set to  0.000000
10/27/2011	3:08:43 PM	BCl3 MFC set to  0.000000
10/27/2011	3:08:43 PM	PHl3 MFC set to  0.000000
10/27/2011	3:08:43 PM	SiCl4 MFC set to  0.000000
10/27/2011	3:08:43 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	3:08:43 PM	Tube furnace set to 0
10/27/2011	3:08:44 PM	Run finished at 3:08 PM
10/27/2011	3:08:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/27/2011	3:25:53 PM	Helium MFC set to  15.000000
10/27/2011	3:25:55 PM	Helium valve opened
10/27/2011	3:28:28 PM	Helium valve closed
10/27/2011	3:28:31 PM	Helium MFC set to  0.000000
10/27/2011	3:36:46 PM	Helium MFC set to  15.000000
10/27/2011	3:36:47 PM	Helium valve opened
10/27/2011	3:36:52 PM	Helium valve closed
10/27/2011	3:48:35 PM	Tube furnace set to 100
10/27/2011	3:49:03 PM	Main Vac valve closed
10/27/2011	3:49:28 PM	Main Vac valve opened
10/27/2011	3:49:31 PM	Helium valve opened
10/27/2011	3:49:31 PM	Helium valve closed
10/27/2011	3:51:44 PM	Recipe started at 3:51 PM
10/27/2011	3:51:44 PM	Helium valve closed
10/27/2011	3:51:44 PM	H2 valve closed
10/27/2011	3:51:44 PM	BCl3 valve closed
10/27/2011	3:51:44 PM	PH3 valve closed
10/27/2011	3:51:44 PM	SiCl4 pre valve closed
10/27/2011	3:51:44 PM	SiCl4 post valve closed
10/27/2011	3:51:44 PM	Main Vac valve closed
10/27/2011	3:51:44 PM	Bypass valve closed
10/27/2011	3:51:44 PM	Bubbler valve closed
10/27/2011	3:51:44 PM	Helium MFC set to  0.000000
10/27/2011	3:51:44 PM	H2 MFC set to  0.000000
10/27/2011	3:51:44 PM	BCl3 MFC set to  0.000000
10/27/2011	3:51:44 PM	PHl3 MFC set to  0.000000
10/27/2011	3:51:44 PM	SiCl4 MFC set to  0.000000
10/27/2011	3:51:44 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	3:51:44 PM	Tube furnace set to 0
10/27/2011	3:51:47 PM	Helium valve closed
10/27/2011	3:51:47 PM	BCl3 valve closed
10/27/2011	3:51:47 PM	PH3 valve closed
10/27/2011	3:51:47 PM	SiCl4 pre valve closed
10/27/2011	3:51:47 PM	SiCl4 post valve closed
10/27/2011	3:51:47 PM	Main Vac valve closed
10/27/2011	3:51:47 PM	Bypass valve closed
10/27/2011	3:51:47 PM	Bubbler valve closed
10/27/2011	3:51:47 PM	H2 valve opened
10/27/2011	3:51:47 PM	Helium MFC set to  0.000000
10/27/2011	3:51:47 PM	H2 MFC set to  500.000000
10/27/2011	3:51:47 PM	BCl3 MFC set to  0.000000
10/27/2011	3:51:47 PM	PHl3 MFC set to  0.000000
10/27/2011	3:51:47 PM	SiCl4 MFC set to  0.000000
10/27/2011	3:51:47 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	3:51:47 PM	Tube furnace set to 100
10/27/2011	3:52:52 PM	Helium valve closed
10/27/2011	3:52:52 PM	BCl3 valve closed
10/27/2011	3:52:52 PM	PH3 valve closed
10/27/2011	3:52:52 PM	SiCl4 pre valve closed
10/27/2011	3:52:52 PM	SiCl4 post valve closed
10/27/2011	3:52:52 PM	Main Vac valve closed
10/27/2011	3:52:52 PM	Bypass valve closed
10/27/2011	3:52:52 PM	H2 valve opened
10/27/2011	3:52:52 PM	Bubbler valve opened
10/27/2011	3:52:52 PM	Helium MFC set to  0.000000
10/27/2011	3:52:52 PM	H2 MFC set to  500.000000
10/27/2011	3:52:52 PM	BCl3 MFC set to  0.000000
10/27/2011	3:52:52 PM	PHl3 MFC set to  0.000000
10/27/2011	3:52:52 PM	SiCl4 MFC set to  0.000000
10/27/2011	3:52:52 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	3:52:52 PM	Tube furnace set to 100
10/27/2011	3:52:53 PM	Helium valve closed
10/27/2011	3:52:53 PM	BCl3 valve closed
10/27/2011	3:52:53 PM	PH3 valve closed
10/27/2011	3:52:53 PM	SiCl4 pre valve closed
10/27/2011	3:52:53 PM	SiCl4 post valve closed
10/27/2011	3:52:53 PM	Main Vac valve closed
10/27/2011	3:52:53 PM	Bypass valve closed
10/27/2011	3:52:53 PM	H2 valve opened
10/27/2011	3:52:53 PM	Bubbler valve opened
10/27/2011	3:52:53 PM	Helium MFC set to  0.000000
10/27/2011	3:52:53 PM	H2 MFC set to  500.000000
10/27/2011	3:52:53 PM	BCl3 MFC set to  0.000000
10/27/2011	3:52:53 PM	PHl3 MFC set to  0.000000
10/27/2011	3:52:53 PM	SiCl4 MFC set to  0.000000
10/27/2011	3:52:53 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	3:52:53 PM	Tube furnace set to 1030
10/27/2011	4:17:53 PM	Helium valve closed
10/27/2011	4:17:53 PM	PH3 valve closed
10/27/2011	4:17:53 PM	Main Vac valve closed
10/27/2011	4:17:53 PM	Bypass valve closed
10/27/2011	4:17:53 PM	H2 valve opened
10/27/2011	4:17:53 PM	BCl3 valve opened
10/27/2011	4:17:53 PM	SiCl4 pre valve opened
10/27/2011	4:17:53 PM	SiCl4 post valve opened
10/27/2011	4:17:53 PM	Bubbler valve opened
10/27/2011	4:17:53 PM	Helium MFC set to  0.000000
10/27/2011	4:17:53 PM	H2 MFC set to  500.000000
10/27/2011	4:17:53 PM	BCl3 MFC set to  2.400000
10/27/2011	4:17:53 PM	PHl3 MFC set to  0.000000
10/27/2011	4:17:53 PM	SiCl4 MFC set to  60.000000
10/27/2011	4:17:53 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	4:17:54 PM	Tube furnace set to 1030
10/27/2011	4:27:54 PM	Helium valve closed
10/27/2011	4:27:54 PM	BCl3 valve closed
10/27/2011	4:27:54 PM	PH3 valve closed
10/27/2011	4:27:54 PM	SiCl4 pre valve closed
10/27/2011	4:27:54 PM	SiCl4 post valve closed
10/27/2011	4:27:54 PM	Main Vac valve closed
10/27/2011	4:27:54 PM	Bypass valve closed
10/27/2011	4:27:54 PM	H2 valve opened
10/27/2011	4:27:54 PM	Bubbler valve opened
10/27/2011	4:27:54 PM	Helium MFC set to  0.000000
10/27/2011	4:27:54 PM	H2 MFC set to  500.000000
10/27/2011	4:27:54 PM	BCl3 MFC set to  0.000000
10/27/2011	4:27:54 PM	PHl3 MFC set to  0.000000
10/27/2011	4:27:54 PM	SiCl4 MFC set to  0.000000
10/27/2011	4:27:54 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	4:27:54 PM	Tube furnace set to 750
10/27/2011	4:37:54 PM	H2 valve closed
10/27/2011	4:37:54 PM	BCl3 valve closed
10/27/2011	4:37:54 PM	PH3 valve closed
10/27/2011	4:37:54 PM	SiCl4 pre valve closed
10/27/2011	4:37:54 PM	SiCl4 post valve closed
10/27/2011	4:37:54 PM	Main Vac valve closed
10/27/2011	4:37:54 PM	Bypass valve closed
10/27/2011	4:37:54 PM	Helium valve opened
10/27/2011	4:37:54 PM	Bubbler valve opened
10/27/2011	4:37:54 PM	Helium MFC set to  400.000000
10/27/2011	4:37:54 PM	H2 MFC set to  0.000000
10/27/2011	4:37:54 PM	BCl3 MFC set to  0.000000
10/27/2011	4:37:54 PM	PHl3 MFC set to  0.000000
10/27/2011	4:37:54 PM	SiCl4 MFC set to  0.000000
10/27/2011	4:37:54 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	4:37:54 PM	Tube furnace set to 0
10/27/2011	4:57:54 PM	Helium valve closed
10/27/2011	4:57:54 PM	H2 valve closed
10/27/2011	4:57:54 PM	BCl3 valve closed
10/27/2011	4:57:54 PM	PH3 valve closed
10/27/2011	4:57:54 PM	SiCl4 pre valve closed
10/27/2011	4:57:54 PM	SiCl4 post valve closed
10/27/2011	4:57:54 PM	Main Vac valve closed
10/27/2011	4:57:54 PM	Bypass valve closed
10/27/2011	4:57:54 PM	Bubbler valve closed
10/27/2011	4:57:54 PM	Helium MFC set to  0.000000
10/27/2011	4:57:54 PM	H2 MFC set to  0.000000
10/27/2011	4:57:54 PM	BCl3 MFC set to  0.000000
10/27/2011	4:57:54 PM	PHl3 MFC set to  0.000000
10/27/2011	4:57:54 PM	SiCl4 MFC set to  0.000000
10/27/2011	4:57:54 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	4:57:54 PM	Tube furnace set to 0
10/27/2011	5:17:07 PM	Run finished at 5:17 PM
10/27/2011	5:17:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/27/2011	5:17:10 PM	Recipe started at 5:17 PM
10/27/2011	5:17:10 PM	Helium valve closed
10/27/2011	5:17:10 PM	H2 valve closed
10/27/2011	5:17:10 PM	BCl3 valve closed
10/27/2011	5:17:10 PM	PH3 valve closed
10/27/2011	5:17:10 PM	SiCl4 pre valve closed
10/27/2011	5:17:10 PM	SiCl4 post valve closed
10/27/2011	5:17:10 PM	Main Vac valve closed
10/27/2011	5:17:10 PM	Bypass valve closed
10/27/2011	5:17:10 PM	Bubbler valve closed
10/27/2011	5:17:10 PM	Helium MFC set to  0.000000
10/27/2011	5:17:10 PM	H2 MFC set to  0.000000
10/27/2011	5:17:10 PM	BCl3 MFC set to  0.000000
10/27/2011	5:17:10 PM	PHl3 MFC set to  0.000000
10/27/2011	5:17:10 PM	SiCl4 MFC set to  0.000000
10/27/2011	5:17:10 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	5:17:10 PM	Tube furnace set to 0
10/27/2011	5:17:13 PM	H2 valve closed
10/27/2011	5:17:13 PM	BCl3 valve closed
10/27/2011	5:17:13 PM	PH3 valve closed
10/27/2011	5:17:13 PM	SiCl4 pre valve closed
10/27/2011	5:17:13 PM	SiCl4 post valve closed
10/27/2011	5:17:13 PM	Main Vac valve closed
10/27/2011	5:17:13 PM	Bypass valve closed
10/27/2011	5:17:13 PM	Bubbler valve closed
10/27/2011	5:17:13 PM	Helium valve opened
10/27/2011	5:17:13 PM	Helium MFC set to  500.000000
10/27/2011	5:17:13 PM	H2 MFC set to  0.000000
10/27/2011	5:17:13 PM	BCl3 MFC set to  0.000000
10/27/2011	5:17:13 PM	PHl3 MFC set to  0.000000
10/27/2011	5:17:13 PM	SiCl4 MFC set to  0.000000
10/27/2011	5:17:13 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	5:17:13 PM	Tube furnace set to 0
10/27/2011	5:17:17 PM	Helium valve closed
10/27/2011	5:17:17 PM	H2 valve closed
10/27/2011	5:17:17 PM	BCl3 valve closed
10/27/2011	5:17:17 PM	PH3 valve closed
10/27/2011	5:17:17 PM	SiCl4 pre valve closed
10/27/2011	5:17:17 PM	SiCl4 post valve closed
10/27/2011	5:17:17 PM	Main Vac valve closed
10/27/2011	5:17:17 PM	Bypass valve closed
10/27/2011	5:17:17 PM	Bubbler valve closed
10/27/2011	5:17:17 PM	Helium MFC set to  0.000000
10/27/2011	5:17:17 PM	H2 MFC set to  0.000000
10/27/2011	5:17:17 PM	BCl3 MFC set to  0.000000
10/27/2011	5:17:17 PM	PHl3 MFC set to  0.000000
10/27/2011	5:17:17 PM	SiCl4 MFC set to  0.000000
10/27/2011	5:17:17 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	5:17:17 PM	Tube furnace set to 0
10/27/2011	5:17:18 PM	Run finished at 5:17 PM
10/27/2011	5:17:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/27/2011	5:18:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/27/2011	5:18:44 PM	Recipe started at 5:18 PM
10/27/2011	5:18:44 PM	Helium valve closed
10/27/2011	5:18:44 PM	H2 valve closed
10/27/2011	5:18:44 PM	BCl3 valve closed
10/27/2011	5:18:44 PM	PH3 valve closed
10/27/2011	5:18:44 PM	SiCl4 pre valve closed
10/27/2011	5:18:44 PM	SiCl4 post valve closed
10/27/2011	5:18:44 PM	Main Vac valve closed
10/27/2011	5:18:44 PM	Bypass valve closed
10/27/2011	5:18:44 PM	Bubbler valve closed
10/27/2011	5:18:44 PM	Helium MFC set to  0.000000
10/27/2011	5:18:44 PM	H2 MFC set to  0.000000
10/27/2011	5:18:44 PM	BCl3 MFC set to  0.000000
10/27/2011	5:18:44 PM	PHl3 MFC set to  0.000000
10/27/2011	5:18:44 PM	SiCl4 MFC set to  0.000000
10/27/2011	5:18:44 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	5:18:44 PM	Tube furnace set to 0
10/27/2011	5:18:47 PM	H2 valve closed
10/27/2011	5:18:47 PM	BCl3 valve closed
10/27/2011	5:18:47 PM	PH3 valve closed
10/27/2011	5:18:47 PM	SiCl4 pre valve closed
10/27/2011	5:18:47 PM	SiCl4 post valve closed
10/27/2011	5:18:47 PM	Main Vac valve closed
10/27/2011	5:18:47 PM	Bypass valve closed
10/27/2011	5:18:47 PM	Bubbler valve closed
10/27/2011	5:18:47 PM	Helium valve opened
10/27/2011	5:18:47 PM	Helium MFC set to  500.000000
10/27/2011	5:18:47 PM	H2 MFC set to  0.000000
10/27/2011	5:18:47 PM	BCl3 MFC set to  0.000000
10/27/2011	5:18:47 PM	PHl3 MFC set to  0.000000
10/27/2011	5:18:47 PM	SiCl4 MFC set to  0.000000
10/27/2011	5:18:47 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	5:18:47 PM	Tube furnace set to 0
10/27/2011	5:18:48 PM	Helium valve closed
10/27/2011	5:18:48 PM	H2 valve closed
10/27/2011	5:18:48 PM	BCl3 valve closed
10/27/2011	5:18:48 PM	PH3 valve closed
10/27/2011	5:18:48 PM	SiCl4 pre valve closed
10/27/2011	5:18:48 PM	SiCl4 post valve closed
10/27/2011	5:18:48 PM	Main Vac valve closed
10/27/2011	5:18:48 PM	Bypass valve closed
10/27/2011	5:18:48 PM	Bubbler valve closed
10/27/2011	5:18:48 PM	Helium MFC set to  0.000000
10/27/2011	5:18:48 PM	H2 MFC set to  0.000000
10/27/2011	5:18:48 PM	BCl3 MFC set to  0.000000
10/27/2011	5:18:48 PM	PHl3 MFC set to  0.000000
10/27/2011	5:18:48 PM	SiCl4 MFC set to  0.000000
10/27/2011	5:18:48 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	5:18:48 PM	Tube furnace set to 0
10/27/2011	5:18:49 PM	Run finished at 5:18 PM
10/27/2011	5:18:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/27/2011	5:21:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/27/2011	5:21:32 PM	Recipe started at 5:21 PM
10/27/2011	5:21:32 PM	Helium valve closed
10/27/2011	5:21:32 PM	H2 valve closed
10/27/2011	5:21:32 PM	BCl3 valve closed
10/27/2011	5:21:32 PM	PH3 valve closed
10/27/2011	5:21:32 PM	SiCl4 pre valve closed
10/27/2011	5:21:32 PM	SiCl4 post valve closed
10/27/2011	5:21:32 PM	Main Vac valve closed
10/27/2011	5:21:32 PM	Bubbler valve closed
10/27/2011	5:21:32 PM	Bypass valve opened
10/27/2011	5:21:32 PM	Helium MFC set to  0.000000
10/27/2011	5:21:32 PM	H2 MFC set to  0.000000
10/27/2011	5:21:32 PM	BCl3 MFC set to  0.000000
10/27/2011	5:21:32 PM	PHl3 MFC set to  0.000000
10/27/2011	5:21:32 PM	SiCl4 MFC set to  0.000000
10/27/2011	5:21:32 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	5:21:32 PM	Tube furnace set to 0
10/27/2011	5:22:34 PM	Helium valve closed
10/27/2011	5:22:34 PM	H2 valve closed
10/27/2011	5:22:34 PM	BCl3 valve closed
10/27/2011	5:22:34 PM	PH3 valve closed
10/27/2011	5:22:34 PM	SiCl4 pre valve closed
10/27/2011	5:22:34 PM	SiCl4 post valve closed
10/27/2011	5:22:34 PM	Main Vac valve closed
10/27/2011	5:22:34 PM	Bubbler valve closed
10/27/2011	5:22:34 PM	Bypass valve opened
10/27/2011	5:22:34 PM	Helium MFC set to  0.000000
10/27/2011	5:22:34 PM	H2 MFC set to  0.000000
10/27/2011	5:22:34 PM	BCl3 MFC set to  0.000000
10/27/2011	5:22:34 PM	PHl3 MFC set to  0.000000
10/27/2011	5:22:34 PM	SiCl4 MFC set to  0.000000
10/27/2011	5:22:34 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	5:22:34 PM	Tube furnace set to 0
10/27/2011	5:23:34 PM	Helium valve closed
10/27/2011	5:23:34 PM	H2 valve closed
10/27/2011	5:23:34 PM	BCl3 valve closed
10/27/2011	5:23:34 PM	PH3 valve closed
10/27/2011	5:23:34 PM	SiCl4 pre valve closed
10/27/2011	5:23:34 PM	SiCl4 post valve closed
10/27/2011	5:23:34 PM	Bypass valve closed
10/27/2011	5:23:34 PM	Bubbler valve closed
10/27/2011	5:23:34 PM	Main Vac valve opened
10/27/2011	5:23:34 PM	Helium MFC set to  0.000000
10/27/2011	5:23:34 PM	H2 MFC set to  0.000000
10/27/2011	5:23:34 PM	BCl3 MFC set to  0.000000
10/27/2011	5:23:34 PM	PHl3 MFC set to  0.000000
10/27/2011	5:23:34 PM	SiCl4 MFC set to  0.000000
10/27/2011	5:23:34 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	5:23:34 PM	Tube furnace set to 0
10/27/2011	5:23:35 PM	Run finished at 5:23 PM
10/27/2011	5:23:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/27/2011	5:41:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/27/2011	5:41:47 PM	Recipe started at 5:41 PM
10/27/2011	5:41:47 PM	Helium valve closed
10/27/2011	5:41:47 PM	H2 valve closed
10/27/2011	5:41:47 PM	BCl3 valve closed
10/27/2011	5:41:47 PM	PH3 valve closed
10/27/2011	5:41:47 PM	SiCl4 pre valve closed
10/27/2011	5:41:47 PM	SiCl4 post valve closed
10/27/2011	5:41:47 PM	Main Vac valve closed
10/27/2011	5:41:47 PM	Bypass valve closed
10/27/2011	5:41:47 PM	Bubbler valve closed
10/27/2011	5:41:47 PM	Helium MFC set to  0.000000
10/27/2011	5:41:47 PM	H2 MFC set to  0.000000
10/27/2011	5:41:47 PM	BCl3 MFC set to  0.000000
10/27/2011	5:41:47 PM	PHl3 MFC set to  0.000000
10/27/2011	5:41:47 PM	SiCl4 MFC set to  0.000000
10/27/2011	5:41:47 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	5:41:48 PM	Tube furnace set to 0
10/27/2011	5:41:51 PM	H2 valve closed
10/27/2011	5:41:51 PM	BCl3 valve closed
10/27/2011	5:41:51 PM	PH3 valve closed
10/27/2011	5:41:51 PM	SiCl4 pre valve closed
10/27/2011	5:41:51 PM	SiCl4 post valve closed
10/27/2011	5:41:51 PM	Main Vac valve closed
10/27/2011	5:41:51 PM	Bypass valve closed
10/27/2011	5:41:51 PM	Bubbler valve closed
10/27/2011	5:41:51 PM	Helium valve opened
10/27/2011	5:41:51 PM	Helium MFC set to  500.000000
10/27/2011	5:41:51 PM	H2 MFC set to  0.000000
10/27/2011	5:41:51 PM	BCl3 MFC set to  0.000000
10/27/2011	5:41:51 PM	PHl3 MFC set to  0.000000
10/27/2011	5:41:51 PM	SiCl4 MFC set to  0.000000
10/27/2011	5:41:51 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	5:41:51 PM	Tube furnace set to 0
10/27/2011	5:42:52 PM	Helium valve closed
10/27/2011	5:42:52 PM	H2 valve closed
10/27/2011	5:42:52 PM	BCl3 valve closed
10/27/2011	5:42:52 PM	PH3 valve closed
10/27/2011	5:42:52 PM	SiCl4 pre valve closed
10/27/2011	5:42:52 PM	SiCl4 post valve closed
10/27/2011	5:42:52 PM	Main Vac valve closed
10/27/2011	5:42:52 PM	Bypass valve closed
10/27/2011	5:42:52 PM	Bubbler valve closed
10/27/2011	5:42:52 PM	Helium MFC set to  0.000000
10/27/2011	5:42:52 PM	H2 MFC set to  0.000000
10/27/2011	5:42:52 PM	BCl3 MFC set to  0.000000
10/27/2011	5:42:52 PM	PHl3 MFC set to  0.000000
10/27/2011	5:42:52 PM	SiCl4 MFC set to  0.000000
10/27/2011	5:42:52 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	5:42:53 PM	Tube furnace set to 0
10/27/2011	5:42:54 PM	Run finished at 5:42 PM
10/27/2011	5:42:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/27/2011	5:56:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/27/2011	5:56:50 PM	Recipe started at 5:56 PM
10/27/2011	5:56:50 PM	Helium valve closed
10/27/2011	5:56:50 PM	H2 valve closed
10/27/2011	5:56:50 PM	BCl3 valve closed
10/27/2011	5:56:50 PM	PH3 valve closed
10/27/2011	5:56:50 PM	SiCl4 pre valve closed
10/27/2011	5:56:50 PM	SiCl4 post valve closed
10/27/2011	5:56:50 PM	Main Vac valve closed
10/27/2011	5:56:50 PM	Bubbler valve closed
10/27/2011	5:56:50 PM	Bypass valve opened
10/27/2011	5:56:50 PM	Helium MFC set to  0.000000
10/27/2011	5:56:50 PM	H2 MFC set to  0.000000
10/27/2011	5:56:50 PM	BCl3 MFC set to  0.000000
10/27/2011	5:56:50 PM	PHl3 MFC set to  0.000000
10/27/2011	5:56:50 PM	SiCl4 MFC set to  0.000000
10/27/2011	5:56:50 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	5:56:50 PM	Tube furnace set to 0
10/27/2011	5:57:56 PM	Helium valve closed
10/27/2011	5:57:56 PM	H2 valve closed
10/27/2011	5:57:56 PM	BCl3 valve closed
10/27/2011	5:57:56 PM	PH3 valve closed
10/27/2011	5:57:56 PM	SiCl4 pre valve closed
10/27/2011	5:57:56 PM	SiCl4 post valve closed
10/27/2011	5:57:56 PM	Main Vac valve closed
10/27/2011	5:57:56 PM	Bubbler valve closed
10/27/2011	5:57:56 PM	Bypass valve opened
10/27/2011	5:57:56 PM	Helium MFC set to  0.000000
10/27/2011	5:57:56 PM	H2 MFC set to  0.000000
10/27/2011	5:57:56 PM	BCl3 MFC set to  0.000000
10/27/2011	5:57:56 PM	PHl3 MFC set to  0.000000
10/27/2011	5:57:56 PM	SiCl4 MFC set to  0.000000
10/27/2011	5:57:56 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	5:57:56 PM	Tube furnace set to 0
10/27/2011	5:58:56 PM	Helium valve closed
10/27/2011	5:58:56 PM	H2 valve closed
10/27/2011	5:58:56 PM	BCl3 valve closed
10/27/2011	5:58:57 PM	PH3 valve closed
10/27/2011	5:58:57 PM	SiCl4 pre valve closed
10/27/2011	5:58:57 PM	SiCl4 post valve closed
10/27/2011	5:58:57 PM	Bypass valve closed
10/27/2011	5:58:57 PM	Bubbler valve closed
10/27/2011	5:58:57 PM	Main Vac valve opened
10/27/2011	5:58:57 PM	Helium MFC set to  0.000000
10/27/2011	5:58:57 PM	H2 MFC set to  0.000000
10/27/2011	5:58:57 PM	BCl3 MFC set to  0.000000
10/27/2011	5:58:57 PM	PHl3 MFC set to  0.000000
10/27/2011	5:58:57 PM	SiCl4 MFC set to  0.000000
10/27/2011	5:58:57 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	5:58:57 PM	Tube furnace set to 0
10/27/2011	5:58:58 PM	Run finished at 5:58 PM
10/27/2011	5:58:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/27/2011	5:59:38 PM	Tube furnace set to 50
10/27/2011	7:22:17 PM	Main Vac valve closed
10/27/2011	7:22:49 PM	Main Vac valve opened
10/27/2011	7:22:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/27/2011	7:23:00 PM	Recipe started at 7:22 PM
10/27/2011	7:23:00 PM	Helium valve closed
10/27/2011	7:23:00 PM	H2 valve closed
10/27/2011	7:23:00 PM	BCl3 valve closed
10/27/2011	7:23:00 PM	PH3 valve closed
10/27/2011	7:23:00 PM	SiCl4 pre valve closed
10/27/2011	7:23:00 PM	SiCl4 post valve closed
10/27/2011	7:23:00 PM	Main Vac valve closed
10/27/2011	7:23:00 PM	Bypass valve closed
10/27/2011	7:23:00 PM	Bubbler valve closed
10/27/2011	7:23:00 PM	Helium MFC set to  0.000000
10/27/2011	7:23:00 PM	H2 MFC set to  0.000000
10/27/2011	7:23:00 PM	BCl3 MFC set to  0.000000
10/27/2011	7:23:00 PM	PHl3 MFC set to  0.000000
10/27/2011	7:23:00 PM	SiCl4 MFC set to  0.000000
10/27/2011	7:23:00 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	7:23:00 PM	Tube furnace set to 0
10/27/2011	7:23:03 PM	H2 valve closed
10/27/2011	7:23:03 PM	BCl3 valve closed
10/27/2011	7:23:03 PM	PH3 valve closed
10/27/2011	7:23:03 PM	SiCl4 pre valve closed
10/27/2011	7:23:03 PM	SiCl4 post valve closed
10/27/2011	7:23:03 PM	Main Vac valve closed
10/27/2011	7:23:03 PM	Bypass valve closed
10/27/2011	7:23:03 PM	Bubbler valve closed
10/27/2011	7:23:03 PM	Helium valve opened
10/27/2011	7:23:03 PM	Helium MFC set to  500.000000
10/27/2011	7:23:03 PM	H2 MFC set to  0.000000
10/27/2011	7:23:03 PM	BCl3 MFC set to  0.000000
10/27/2011	7:23:03 PM	PHl3 MFC set to  0.000000
10/27/2011	7:23:03 PM	SiCl4 MFC set to  0.000000
10/27/2011	7:23:03 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	7:23:03 PM	Tube furnace set to 0
10/27/2011	7:24:08 PM	Helium valve closed
10/27/2011	7:24:08 PM	H2 valve closed
10/27/2011	7:24:08 PM	BCl3 valve closed
10/27/2011	7:24:08 PM	PH3 valve closed
10/27/2011	7:24:08 PM	SiCl4 pre valve closed
10/27/2011	7:24:08 PM	SiCl4 post valve closed
10/27/2011	7:24:08 PM	Main Vac valve closed
10/27/2011	7:24:08 PM	Bypass valve closed
10/27/2011	7:24:08 PM	Bubbler valve closed
10/27/2011	7:24:08 PM	Helium MFC set to  0.000000
10/27/2011	7:24:08 PM	H2 MFC set to  0.000000
10/27/2011	7:24:08 PM	BCl3 MFC set to  0.000000
10/27/2011	7:24:08 PM	PHl3 MFC set to  0.000000
10/27/2011	7:24:08 PM	SiCl4 MFC set to  0.000000
10/27/2011	7:24:08 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	7:24:08 PM	Tube furnace set to 0
10/27/2011	7:24:09 PM	Run finished at 7:24 PM
10/27/2011	7:24:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/27/2011	7:33:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/27/2011	7:33:33 PM	Recipe started at 7:33 PM
10/27/2011	7:33:33 PM	Helium valve closed
10/27/2011	7:33:33 PM	H2 valve closed
10/27/2011	7:33:33 PM	BCl3 valve closed
10/27/2011	7:33:33 PM	PH3 valve closed
10/27/2011	7:33:33 PM	SiCl4 pre valve closed
10/27/2011	7:33:33 PM	SiCl4 post valve closed
10/27/2011	7:33:33 PM	Main Vac valve closed
10/27/2011	7:33:33 PM	Bubbler valve closed
10/27/2011	7:33:33 PM	Bypass valve opened
10/27/2011	7:33:33 PM	Helium MFC set to  0.000000
10/27/2011	7:33:33 PM	H2 MFC set to  0.000000
10/27/2011	7:33:33 PM	BCl3 MFC set to  0.000000
10/27/2011	7:33:33 PM	PHl3 MFC set to  0.000000
10/27/2011	7:33:33 PM	SiCl4 MFC set to  0.000000
10/27/2011	7:33:33 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	7:33:33 PM	Tube furnace set to 0
10/27/2011	7:34:40 PM	Helium valve closed
10/27/2011	7:34:40 PM	H2 valve closed
10/27/2011	7:34:40 PM	BCl3 valve closed
10/27/2011	7:34:40 PM	PH3 valve closed
10/27/2011	7:34:40 PM	SiCl4 pre valve closed
10/27/2011	7:34:40 PM	SiCl4 post valve closed
10/27/2011	7:34:40 PM	Main Vac valve closed
10/27/2011	7:34:40 PM	Bubbler valve closed
10/27/2011	7:34:40 PM	Bypass valve opened
10/27/2011	7:34:40 PM	Helium MFC set to  0.000000
10/27/2011	7:34:40 PM	H2 MFC set to  0.000000
10/27/2011	7:34:40 PM	BCl3 MFC set to  0.000000
10/27/2011	7:34:40 PM	PHl3 MFC set to  0.000000
10/27/2011	7:34:40 PM	SiCl4 MFC set to  0.000000
10/27/2011	7:34:40 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	7:34:40 PM	Tube furnace set to 0
10/27/2011	7:35:40 PM	Helium valve closed
10/27/2011	7:35:40 PM	H2 valve closed
10/27/2011	7:35:40 PM	BCl3 valve closed
10/27/2011	7:35:40 PM	PH3 valve closed
10/27/2011	7:35:40 PM	SiCl4 pre valve closed
10/27/2011	7:35:40 PM	SiCl4 post valve closed
10/27/2011	7:35:40 PM	Bypass valve closed
10/27/2011	7:35:40 PM	Bubbler valve closed
10/27/2011	7:35:40 PM	Main Vac valve opened
10/27/2011	7:35:40 PM	Helium MFC set to  0.000000
10/27/2011	7:35:40 PM	H2 MFC set to  0.000000
10/27/2011	7:35:40 PM	BCl3 MFC set to  0.000000
10/27/2011	7:35:40 PM	PHl3 MFC set to  0.000000
10/27/2011	7:35:40 PM	SiCl4 MFC set to  0.000000
10/27/2011	7:35:40 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	7:35:40 PM	Tube furnace set to 0
10/27/2011	7:35:41 PM	Run finished at 7:35 PM
10/27/2011	7:35:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/27/2011	7:37:12 PM	Tube furnace set to 100
10/27/2011	7:37:51 PM	Main Vac valve closed
10/27/2011	7:38:02 PM	Main Vac valve opened
10/27/2011	7:56:44 PM	Helium MFC set to  10.000000
10/27/2011	7:56:49 PM	Helium valve opened
10/27/2011	7:57:23 PM	Helium valve closed
10/27/2011	7:57:26 PM	Helium MFC set to  0.000000
10/27/2011	8:02:03 PM	Main Vac valve closed
10/27/2011	8:02:11 PM	Main Vac valve opened
10/27/2011	8:02:53 PM	Helium MFC set to  20.000000
10/27/2011	8:02:54 PM	Helium valve opened
10/27/2011	8:04:55 PM	Helium valve closed
10/27/2011	8:04:58 PM	Helium MFC set to  0.000000
10/27/2011	8:06:35 PM	Helium MFC set to  20.000000
10/27/2011	8:06:36 PM	Helium valve opened
10/27/2011	8:07:59 PM	Helium MFC set to  0.000000
10/27/2011	8:08:00 PM	Helium valve closed
10/27/2011	8:10:32 PM	Helium MFC set to  20.000000
10/27/2011	8:10:34 PM	Helium valve opened
10/27/2011	8:13:46 PM	Helium valve closed
10/27/2011	8:13:49 PM	Helium MFC set to  0.000000
10/27/2011	8:19:21 PM	Helium MFC set to  30.000000
10/27/2011	8:19:22 PM	Helium valve opened
10/27/2011	8:19:38 PM	Helium valve closed
10/27/2011	8:19:42 PM	Helium MFC set to  0.000000
10/27/2011	8:20:38 PM	Tube furnace set to 50
10/27/2011	9:54:17 PM	Main Vac valve closed
10/27/2011	9:54:41 PM	Tube furnace set to 1020
10/27/2011	9:54:43 PM	Main Vac valve opened
10/27/2011	9:57:05 PM	Tube furnace set to 100
10/27/2011	9:57:48 PM	Recipe started at 9:57 PM
10/27/2011	9:57:48 PM	Helium valve closed
10/27/2011	9:57:48 PM	H2 valve closed
10/27/2011	9:57:48 PM	BCl3 valve closed
10/27/2011	9:57:48 PM	PH3 valve closed
10/27/2011	9:57:48 PM	SiCl4 pre valve closed
10/27/2011	9:57:48 PM	SiCl4 post valve closed
10/27/2011	9:57:48 PM	Main Vac valve closed
10/27/2011	9:57:48 PM	Bypass valve closed
10/27/2011	9:57:48 PM	Bubbler valve closed
10/27/2011	9:57:48 PM	Helium MFC set to  0.000000
10/27/2011	9:57:48 PM	H2 MFC set to  0.000000
10/27/2011	9:57:48 PM	BCl3 MFC set to  0.000000
10/27/2011	9:57:48 PM	PHl3 MFC set to  0.000000
10/27/2011	9:57:48 PM	SiCl4 MFC set to  0.000000
10/27/2011	9:57:48 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	9:57:48 PM	Tube furnace set to 0
10/27/2011	9:57:51 PM	Helium valve closed
10/27/2011	9:57:51 PM	BCl3 valve closed
10/27/2011	9:57:51 PM	PH3 valve closed
10/27/2011	9:57:51 PM	SiCl4 pre valve closed
10/27/2011	9:57:51 PM	SiCl4 post valve closed
10/27/2011	9:57:51 PM	Main Vac valve closed
10/27/2011	9:57:51 PM	Bypass valve closed
10/27/2011	9:57:51 PM	Bubbler valve closed
10/27/2011	9:57:51 PM	H2 valve opened
10/27/2011	9:57:51 PM	Helium MFC set to  0.000000
10/27/2011	9:57:51 PM	H2 MFC set to  500.000000
10/27/2011	9:57:51 PM	BCl3 MFC set to  0.000000
10/27/2011	9:57:51 PM	PHl3 MFC set to  0.000000
10/27/2011	9:57:51 PM	SiCl4 MFC set to  0.000000
10/27/2011	9:57:51 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	9:57:51 PM	Tube furnace set to 100
10/27/2011	9:58:53 PM	Helium valve closed
10/27/2011	9:58:53 PM	BCl3 valve closed
10/27/2011	9:58:53 PM	PH3 valve closed
10/27/2011	9:58:53 PM	SiCl4 pre valve closed
10/27/2011	9:58:53 PM	SiCl4 post valve closed
10/27/2011	9:58:53 PM	Main Vac valve closed
10/27/2011	9:58:53 PM	Bypass valve closed
10/27/2011	9:58:53 PM	H2 valve opened
10/27/2011	9:58:53 PM	Bubbler valve opened
10/27/2011	9:58:53 PM	Helium MFC set to  0.000000
10/27/2011	9:58:53 PM	H2 MFC set to  500.000000
10/27/2011	9:58:53 PM	BCl3 MFC set to  0.000000
10/27/2011	9:58:53 PM	PHl3 MFC set to  0.000000
10/27/2011	9:58:53 PM	SiCl4 MFC set to  0.000000
10/27/2011	9:58:53 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	9:58:53 PM	Tube furnace set to 1020
10/27/2011	9:58:54 PM	Helium valve closed
10/27/2011	9:58:54 PM	BCl3 valve closed
10/27/2011	9:58:54 PM	PH3 valve closed
10/27/2011	9:58:54 PM	SiCl4 pre valve closed
10/27/2011	9:58:54 PM	SiCl4 post valve closed
10/27/2011	9:58:54 PM	Main Vac valve closed
10/27/2011	9:58:54 PM	Bypass valve closed
10/27/2011	9:58:54 PM	H2 valve opened
10/27/2011	9:58:55 PM	Bubbler valve opened
10/27/2011	9:58:55 PM	Helium MFC set to  0.000000
10/27/2011	9:58:55 PM	H2 MFC set to  500.000000
10/27/2011	9:58:55 PM	BCl3 MFC set to  0.000000
10/27/2011	9:58:55 PM	PHl3 MFC set to  0.000000
10/27/2011	9:58:55 PM	SiCl4 MFC set to  0.000000
10/27/2011	9:58:55 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	9:58:55 PM	Tube furnace set to 1010
10/27/2011	10:22:55 PM	Helium valve closed
10/27/2011	10:22:55 PM	PH3 valve closed
10/27/2011	10:22:55 PM	Main Vac valve closed
10/27/2011	10:22:55 PM	Bypass valve closed
10/27/2011	10:22:55 PM	H2 valve opened
10/27/2011	10:22:55 PM	BCl3 valve opened
10/27/2011	10:22:55 PM	SiCl4 pre valve opened
10/27/2011	10:22:55 PM	SiCl4 post valve opened
10/27/2011	10:22:55 PM	Bubbler valve opened
10/27/2011	10:22:55 PM	Helium MFC set to  0.000000
10/27/2011	10:22:55 PM	H2 MFC set to  500.000000
10/27/2011	10:22:55 PM	BCl3 MFC set to  2.400000
10/27/2011	10:22:55 PM	PHl3 MFC set to  0.000000
10/27/2011	10:22:55 PM	SiCl4 MFC set to  60.000000
10/27/2011	10:22:55 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	10:22:55 PM	Tube furnace set to 1010
10/27/2011	10:32:55 PM	Helium valve closed
10/27/2011	10:32:55 PM	BCl3 valve closed
10/27/2011	10:32:55 PM	PH3 valve closed
10/27/2011	10:32:55 PM	SiCl4 pre valve closed
10/27/2011	10:32:55 PM	SiCl4 post valve closed
10/27/2011	10:32:55 PM	Main Vac valve closed
10/27/2011	10:32:55 PM	Bypass valve closed
10/27/2011	10:32:55 PM	H2 valve opened
10/27/2011	10:32:55 PM	Bubbler valve opened
10/27/2011	10:32:55 PM	Helium MFC set to  0.000000
10/27/2011	10:32:55 PM	H2 MFC set to  500.000000
10/27/2011	10:32:55 PM	BCl3 MFC set to  0.000000
10/27/2011	10:32:55 PM	PHl3 MFC set to  0.000000
10/27/2011	10:32:55 PM	SiCl4 MFC set to  0.000000
10/27/2011	10:32:55 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	10:32:55 PM	Tube furnace set to 750
10/27/2011	10:42:55 PM	H2 valve closed
10/27/2011	10:42:55 PM	BCl3 valve closed
10/27/2011	10:42:55 PM	PH3 valve closed
10/27/2011	10:42:55 PM	SiCl4 pre valve closed
10/27/2011	10:42:55 PM	SiCl4 post valve closed
10/27/2011	10:42:55 PM	Main Vac valve closed
10/27/2011	10:42:55 PM	Bypass valve closed
10/27/2011	10:42:55 PM	Helium valve opened
10/27/2011	10:42:55 PM	Bubbler valve opened
10/27/2011	10:42:55 PM	Helium MFC set to  400.000000
10/27/2011	10:42:55 PM	H2 MFC set to  0.000000
10/27/2011	10:42:55 PM	BCl3 MFC set to  0.000000
10/27/2011	10:42:55 PM	PHl3 MFC set to  0.000000
10/27/2011	10:42:55 PM	SiCl4 MFC set to  0.000000
10/27/2011	10:42:55 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	10:42:55 PM	Tube furnace set to 0
10/27/2011	10:53:00 PM	Helium valve closed
10/27/2011	10:53:00 PM	H2 valve closed
10/27/2011	10:53:00 PM	BCl3 valve closed
10/27/2011	10:53:00 PM	PH3 valve closed
10/27/2011	10:53:00 PM	SiCl4 pre valve closed
10/27/2011	10:53:00 PM	SiCl4 post valve closed
10/27/2011	10:53:00 PM	Main Vac valve closed
10/27/2011	10:53:00 PM	Bypass valve closed
10/27/2011	10:53:00 PM	Bubbler valve closed
10/27/2011	10:53:00 PM	Helium MFC set to  0.000000
10/27/2011	10:53:00 PM	H2 MFC set to  0.000000
10/27/2011	10:53:00 PM	BCl3 MFC set to  0.000000
10/27/2011	10:53:00 PM	PHl3 MFC set to  0.000000
10/27/2011	10:53:00 PM	SiCl4 MFC set to  0.000000
10/27/2011	10:53:00 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	10:53:00 PM	Tube furnace set to 0
10/27/2011	10:53:04 PM	Run finished at 10:53 PM
10/27/2011	10:53:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/27/2011	10:53:07 PM	Recipe started at 10:53 PM
10/27/2011	10:53:07 PM	Helium valve closed
10/27/2011	10:53:07 PM	H2 valve closed
10/27/2011	10:53:07 PM	BCl3 valve closed
10/27/2011	10:53:07 PM	PH3 valve closed
10/27/2011	10:53:07 PM	SiCl4 pre valve closed
10/27/2011	10:53:07 PM	SiCl4 post valve closed
10/27/2011	10:53:07 PM	Main Vac valve closed
10/27/2011	10:53:07 PM	Bubbler valve closed
10/27/2011	10:53:07 PM	Bypass valve opened
10/27/2011	10:53:07 PM	Helium MFC set to  0.000000
10/27/2011	10:53:07 PM	H2 MFC set to  0.000000
10/27/2011	10:53:07 PM	BCl3 MFC set to  0.000000
10/27/2011	10:53:07 PM	PHl3 MFC set to  0.000000
10/27/2011	10:53:07 PM	SiCl4 MFC set to  0.000000
10/27/2011	10:53:07 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	10:53:07 PM	Tube furnace set to 0
10/27/2011	10:53:09 PM	Run aborted at 10:53 PM
10/27/2011	10:53:09 PM	Helium valve closed
10/27/2011	10:53:09 PM	H2 valve closed
10/27/2011	10:53:09 PM	BCl3 valve closed
10/27/2011	10:53:09 PM	PH3 valve closed
10/27/2011	10:53:09 PM	SiCl4 pre valve closed
10/27/2011	10:53:09 PM	SiCl4 post valve closed
10/27/2011	10:53:09 PM	Bypass valve closed
10/27/2011	10:53:09 PM	Main Vac valve closed
10/27/2011	10:53:09 PM	Bubbler valve closed
10/27/2011	10:53:09 PM	Helium MFC set to  0.000000
10/27/2011	10:53:09 PM	H2 MFC set to  0.000000
10/27/2011	10:53:09 PM	BCl3 MFC set to  0.000000
10/27/2011	10:53:09 PM	PHl3 MFC set to  0.000000
10/27/2011	10:53:09 PM	SiCl4 MFC set to  0.000000
10/27/2011	10:53:09 PM	Tube furnace set to 0
10/27/2011	10:53:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/27/2011	10:53:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/27/2011	10:53:16 PM	Recipe started at 10:53 PM
10/27/2011	10:53:16 PM	Helium valve closed
10/27/2011	10:53:16 PM	H2 valve closed
10/27/2011	10:53:16 PM	BCl3 valve closed
10/27/2011	10:53:16 PM	PH3 valve closed
10/27/2011	10:53:16 PM	SiCl4 pre valve closed
10/27/2011	10:53:16 PM	SiCl4 post valve closed
10/27/2011	10:53:16 PM	Main Vac valve closed
10/27/2011	10:53:16 PM	Bypass valve closed
10/27/2011	10:53:16 PM	Bubbler valve closed
10/27/2011	10:53:16 PM	Helium MFC set to  0.000000
10/27/2011	10:53:16 PM	H2 MFC set to  0.000000
10/27/2011	10:53:16 PM	BCl3 MFC set to  0.000000
10/27/2011	10:53:16 PM	PHl3 MFC set to  0.000000
10/27/2011	10:53:16 PM	SiCl4 MFC set to  0.000000
10/27/2011	10:53:16 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	10:53:16 PM	Tube furnace set to 0
10/27/2011	10:53:19 PM	H2 valve closed
10/27/2011	10:53:19 PM	BCl3 valve closed
10/27/2011	10:53:19 PM	PH3 valve closed
10/27/2011	10:53:19 PM	SiCl4 pre valve closed
10/27/2011	10:53:19 PM	SiCl4 post valve closed
10/27/2011	10:53:19 PM	Main Vac valve closed
10/27/2011	10:53:19 PM	Bypass valve closed
10/27/2011	10:53:19 PM	Bubbler valve closed
10/27/2011	10:53:19 PM	Helium valve opened
10/27/2011	10:53:19 PM	Helium MFC set to  500.000000
10/27/2011	10:53:19 PM	H2 MFC set to  0.000000
10/27/2011	10:53:19 PM	BCl3 MFC set to  0.000000
10/27/2011	10:53:19 PM	PHl3 MFC set to  0.000000
10/27/2011	10:53:19 PM	SiCl4 MFC set to  0.000000
10/27/2011	10:53:19 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	10:53:19 PM	Tube furnace set to 0
10/27/2011	10:53:49 PM	Helium valve closed
10/27/2011	10:53:49 PM	H2 valve closed
10/27/2011	10:53:49 PM	BCl3 valve closed
10/27/2011	10:53:49 PM	PH3 valve closed
10/27/2011	10:53:49 PM	SiCl4 pre valve closed
10/27/2011	10:53:49 PM	SiCl4 post valve closed
10/27/2011	10:53:49 PM	Main Vac valve closed
10/27/2011	10:53:49 PM	Bypass valve closed
10/27/2011	10:53:49 PM	Bubbler valve closed
10/27/2011	10:53:49 PM	Helium MFC set to  0.000000
10/27/2011	10:53:49 PM	H2 MFC set to  0.000000
10/27/2011	10:53:49 PM	BCl3 MFC set to  0.000000
10/27/2011	10:53:49 PM	PHl3 MFC set to  0.000000
10/27/2011	10:53:49 PM	SiCl4 MFC set to  0.000000
10/27/2011	10:53:49 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	10:53:49 PM	Tube furnace set to 0
10/27/2011	10:53:50 PM	Run finished at 10:53 PM
10/27/2011	10:53:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/27/2011	10:54:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/27/2011	10:54:57 PM	Recipe started at 10:54 PM
10/27/2011	10:54:57 PM	Helium valve closed
10/27/2011	10:54:57 PM	H2 valve closed
10/27/2011	10:54:57 PM	BCl3 valve closed
10/27/2011	10:54:57 PM	PH3 valve closed
10/27/2011	10:54:57 PM	SiCl4 pre valve closed
10/27/2011	10:54:57 PM	SiCl4 post valve closed
10/27/2011	10:54:57 PM	Main Vac valve closed
10/27/2011	10:54:57 PM	Bubbler valve closed
10/27/2011	10:54:57 PM	Bypass valve opened
10/27/2011	10:54:57 PM	Helium MFC set to  0.000000
10/27/2011	10:54:57 PM	H2 MFC set to  0.000000
10/27/2011	10:54:57 PM	BCl3 MFC set to  0.000000
10/27/2011	10:54:57 PM	PHl3 MFC set to  0.000000
10/27/2011	10:54:57 PM	SiCl4 MFC set to  0.000000
10/27/2011	10:54:57 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	10:54:57 PM	Tube furnace set to 0
10/27/2011	10:55:58 PM	Helium valve closed
10/27/2011	10:55:58 PM	H2 valve closed
10/27/2011	10:55:58 PM	BCl3 valve closed
10/27/2011	10:55:58 PM	PH3 valve closed
10/27/2011	10:55:58 PM	SiCl4 pre valve closed
10/27/2011	10:55:58 PM	SiCl4 post valve closed
10/27/2011	10:55:58 PM	Main Vac valve closed
10/27/2011	10:55:58 PM	Bubbler valve closed
10/27/2011	10:55:58 PM	Bypass valve opened
10/27/2011	10:55:58 PM	Helium MFC set to  0.000000
10/27/2011	10:55:58 PM	H2 MFC set to  0.000000
10/27/2011	10:55:58 PM	BCl3 MFC set to  0.000000
10/27/2011	10:55:58 PM	PHl3 MFC set to  0.000000
10/27/2011	10:55:58 PM	SiCl4 MFC set to  0.000000
10/27/2011	10:55:58 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	10:55:58 PM	Tube furnace set to 0
10/27/2011	10:56:58 PM	Helium valve closed
10/27/2011	10:56:58 PM	H2 valve closed
10/27/2011	10:56:58 PM	BCl3 valve closed
10/27/2011	10:56:58 PM	PH3 valve closed
10/27/2011	10:56:58 PM	SiCl4 pre valve closed
10/27/2011	10:56:58 PM	SiCl4 post valve closed
10/27/2011	10:56:58 PM	Bypass valve closed
10/27/2011	10:56:58 PM	Bubbler valve closed
10/27/2011	10:56:58 PM	Main Vac valve opened
10/27/2011	10:56:58 PM	Helium MFC set to  0.000000
10/27/2011	10:56:58 PM	H2 MFC set to  0.000000
10/27/2011	10:56:58 PM	BCl3 MFC set to  0.000000
10/27/2011	10:56:58 PM	PHl3 MFC set to  0.000000
10/27/2011	10:56:58 PM	SiCl4 MFC set to  0.000000
10/27/2011	10:56:58 PM	Bypass solenoid MFC set to  0.000000
10/27/2011	10:56:58 PM	Tube furnace set to 0
10/27/2011	10:56:59 PM	Run finished at 10:56 PM
10/27/2011	10:56:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
